The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted., 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 123 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient & fluid temperature: -10 to 50° C, Enclosure: IP67 (based on IEC529), 2 Position Single Solenoid, 4/5 PORT SOLENOID VALVE, VVD, 123 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted., VALVE, SGL SOL, CLEAN ROOM, 4/5 PORT SOLENOID VALVE, VVD, 123 lb

for filtration of compressed air requiring high cleanliness for coating lines, compressed air for clean rooms and compressed air for equipment necessary to avoid oils.Super mist separator, Modular connection is possible , Filter replacement time can be judged visually , Port size: 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1/2, 2 , Threads: Rc, G, NPT, SUPER MIST SEPARATOR, SUPER MIST SEPARATOR, 123

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improvingáease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *:á 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *:á 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, Compact Cylinder, CQ2-Z, COMPACT CYLINDER, 493, 123

for filtration of compressed air requiring high cleanliness for coating lines, compressed air for clean rooms and compressed air for equipment necessary to avoid oils.Super mist separator, Modular connection is possible , Filter replacement time can be judged visually , Port size: 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1/2, 2 , Threads: Rc, G, NPT, SUPER MIST SEPARATOR, SUPER MIST SEPARATOR, 123

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size m42 m56.4 Electric specifications Motor type Battery-less absolute (Step motor 24 VDC) Encoder Battery-less absolute (4096 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W]*4 38 50 100 Standby power consumption when operating [W]*5 16 44 43 Max. instantaneous power consumption [W]*6 57 123

01-mxp-e

GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

Compact Cylinder

530 551 572 592 100.0 Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123

INFORMATION Step Motor Controller 5 types of communication protocols New New

Dimensions JXCL1 35 4.5 For body mounting (Screw mounting) (11.5) 67 32.5 1.2 84.2 64.2 35 193.2 (When removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123

Multi-Axis Step Motor Controller

Refer to the dimension drawings on pages 7 and 10 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimension No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T U V X2 CV Without lock With lock Without lock With lock 25 15 to 100 243.4 283.4 102.9 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 57.8 126 166 66.6 101 to 400 268.4 308.4 127.9 32 20 to 100 257.8 302.8 116.3 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 61 1 69.8 123 168 83.8 101 to 500 287.8 332.8

Thermo-chiller/Rack Mount Type

Water-cooled Refrigeration HRR010-W-20-m 440 (Includes protruding parts) Cover panel 24 550 50 Serial communication Contact input/output communication connector connector Power supply switch Operation display Internal unit fan 10 Circulating fluid fill port Fluid level gauge Power supply connector Facility water outlet Rc3/8 Circulating fluid return port Rc1/2 183.6 Handle 7 123 221 220 134

Lightweight and Compact

Be sure to reset the alarm with the thermochiller main unit. 29 123 Thermo-chiller connection side 141 Cable Wired remote controller connection side M12/4-core connector (socket side) To use the wired remote controller, the thermo-chiller main unit setting is needed. Use the wired remote controller indoors.

energy saving effect

Be sure to reset the alarm with the thermochiller main unit. 29 123 Thermo-chiller connection side 141 Cable Wired remote controller connection side M12/4-core connector (socket side) To use the wired remote controller, the thermo-chiller main unit setting is needed. Use the wired remote controller indoors.

53

HED 29 HEA IDH 123 Thermo-chiller connection side 141 Cable Wired remote controller connection side M12/4-core connector (socket side) To use the wired remote controller, the thermo-chiller main unit setting is needed. Use the wired remote controller indoors.

Refrigerated Air Dryer

AFF Symbol Nil 10 mm Coating color White 1 AM Weight lbs (kg) 119 (54) 137 (62) 258 (117) 271 (123) Compliant standards UL, CSA AMD Note 1) ANR is under the conditions of 68F (20C) at atmospheric pressure and relative humidity of 65%. Note 2) Air flow capacity for each outlet air pressure dew point is indicated.

Slider Type Ball Screw Drive/11-LEFS Series

Ball screw /Linear guide portion Low particle generation grease Motor size 28 42 56.4 Motor type Step motor (Servo/24 VDC) Electric specifications Encoder Incremental A/B phase (800 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W] Note 6) 22 38 50 100 Standby power consumption when operating [W] Note 7) 18 16 44 43 Max. instantaneous power consumption [W] Note 8) 51 57 123

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

: 10 mm/s2 1.0 Cycle time [s] Cycle time [s] LEL 1.0 LEM 0.5 0.5 LEY Acceleration/Deceleration: 20 mm/s2 Acceleration/Deceleration: 20 mm/s2 LES 0.0 0.0 Stroke [mm] 0 3000 500 1000 1500 2000 2500 Stroke [mm] 0 2000 500 1000 1500 LEPY LEPS Maximum speed/acceleration/deceleration values graph for each stroke LER LEH LEY -X5 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 123

Environment

: 10 mm/s2 1.0 Cycle time [s] Cycle time [s] LEL 1.0 LEM 0.5 0.5 LEY Acceleration/Deceleration: 20 mm/s2 Acceleration/Deceleration: 20 mm/s2 LES 0.0 0.0 Stroke [mm] 0 3000 500 1000 1500 2000 2500 Stroke [mm] 0 2000 500 1000 1500 LEPY LEPS Maximum speed/acceleration/deceleration values graph for each stroke LER LEH LEY -X5 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 123