HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Compact and Lightweight

/2" 1/2" 15.6 17 17 105.7 60.9 28.4 26.4 22 22 10 8 Refer to the standard bracket dimensions.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-X 2 x 4-J 20MC NA NB MA MB KA C B Data K H S + Stroke ZZ + Stroke (mm) Stroke range Bore size (mm) B MM I K M MA MB MC NA NB P S Y ZZ H J D C KA GA GB 20 25 32 40 50 63 80 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 11 12 22 25 25 25 25 17 17 22 30 35 35 38 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 M8 x 1.25 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

IDX-OM-W038

17) (?17) 6.2. (17) (17) IDH4,IDHA4 Rc3/8 1.25 6.5 N.C N.O M3 (N.C:) (N.O:) 2 Rc3/8 6.5 :1.25m m :M3 24 2 (N.O) (N O 244 80 2 184 35 320 56 2 1 15 275 1 80 207 284 455 70 389 498 ( ?10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2.

OMR0031

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Shock absorber specifications cannot be changed by replacing or adding parts. 50 to 500 80 245 80 245 10 to 60 1.96 3.83 15 1.96 4.22 15 Spring force N Extended Compressed Weight g Minimum Strokes for Auto Switch Mounting (mm) Applicable auto switch models Number of auto switches mounted 1 pc. 2 pcs. 5 10 5 10 5 5 D-A9, D-A9V D-F9, D-F9V D-F9W, D-F9WV D-F9BA 2 Series MXP Table Deflection

Series 11-MXJ Air Slide Table

Z ZZ H G 3 +0.03 0 depth 2.5 GA A 15 3.3 3.5 A 5.8 4 x M4 x 0.7 3 +0.05 0 depth 2.5 3 3.5 A-A Model G GA H I J K M Z ZZ 11-MXJ6-5 11-MXJ6-10 11-MXJ6-15 11 17 17 5 17 27.5 42.5 37 43 11 17 17 5 17 27.5 42.5 37 43 Other dimensions are the same as standard model (Series MXJ). 13 22 20 7 20 31.5 47.5 42 48 828 Air Slide Table 11-MXJ Dimensions Basic (Without switch rail) 11-MXJ8-N 12 (Plugged

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

MY1

Black [White] D-Y69A, D-Y7PV, D-Y69B DC() Blue [Black] M2.5 x 4 Slotted set screw D-Y59B, D-Y69B Indicator light 2.5 OUT(+) Brown [Red] SMC 6.2 5 Main circuit of switch 27.3 3.4 OUT() Blue [Black] 8.5 12.5 Most sensitive position 17 Solid State Switches with 2-Color Display: Direct Mounting Type D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) Specifications Grommet D-Y7W, D-Y7WV (with indicator light )

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

rail mounted style [-D].

ZP

N 10 D Model A B C D E Y q Pad dia.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VCB

78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

3

D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V MK MK MK2T CK1 CLK2 CLKG CKQ CLKQ Auto Switch Proper Mounting Position (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-M9AV D-A9V D-M9V D-M9WV D-M9AV CK CLK D-M9A D-A9 D-A9V Bore size (mm) D-M9V D-M9WV CKQ Hs Hs Bore size A B W A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for