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) Grommet 3 m 2-wire Solid state auto switch CKG1 24 VDC 2-color indicator 5 m 2-wire (34) Relay, PLC Pre-wired connector 0.3 m 2-wire (14) 3 m Grommet 2-wire 5 m 2-color indicator Pre-wired connector 24 VDC 2-wire (14) 0.3 m Reed auto switch DC/AC magnetic field CKP1 3 m 24 VDC 100 VAC 1-color indicator Grommet 2-wire 5 m DNote 1) Refer to page 433 when ordering the auto switch mounting

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

Clean Regulator

Applicable tube O.D.: 4 Fitting: KQH04-M5-X17 14 EXH OUT 16.6 IN OUT 864 SRH Series Made to Order Specifications 2 Please contact SMC for detailed dimensions, specifications and lead times.

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

100

material 1 Resin Refer to . on page 14 for replacement parts. 10 Sound absorbing material 2 Resin 11 Valve plate PBT Specific Product Precautions Refer to m on page 14 for replacement parts. 12 Knob POM 13 Needle Brass (Electroless nickel plating) 14 Port block assembly Aluminum alloy/NBR/Stainless steel Refer to b on page 14 for replacement parts. 15 Supply valve, Release valve Refer to

IDX-OM-O004C

T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 16 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 7 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 12 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 12 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 15 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 18 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 2 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 8 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 10 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 20 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 5 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)