IDX-OM-U021

1276 1375 () (1) 1,3 (2) (1) 1,3 () 20 335 7122 670 752 (3) (3) (2) IDF100150F 6-3 6 2 IDX-OM-U021 6 IDF125F-30K16K () (10,2m) ) (10 ( 4 () () JIS 65A 10K 4x (K16K) 2m) 20 4x JIS 65A 10K 25 25 (10,0.7m) 78 9351 267 18 8x19 4x19 A A A 140 1130 140 1120 655 K 18 K 75 K16K (17) 64 (K16K) 17) JIS 65A 10K JIS 65A 10K 40 51 1276 1418) (14~18) 1375 (1) () (1) 1,3 1,3 ()

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Compact Guide Cylinder

Compared with the current product (MGP-Z)) Overall length (Compared with the current product (MGP-Z)) Current product MGP-Z [mm] Current product CXS [mm] Current product MGP-Z [mm] Current product CXS [mm] JMGP [mm] JMGP [mm] Bore size [mm] Bore size Stroke [mm] 12 26 17 17*1 12-10 stroke 52 43 82*1 16 30 18 20*2 16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41 50 64 51

Slider Type Ball Screw Drive/11-LEFS Series

Select the graphs for horizontal of the LEFS40 on page 51. 3. Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Cylinder

II NN I Rod end without '~uto switch illG i ;:xI I ~ 2.FC thread Bore size S z I With 'al:lw switch I wi (mm) 30 51 I 5st 2051 1551 I 20st ~ ~ H 5" 10" 10 st 1 15 51 i 30" P I 6 30.5 35.5 40.5 45.5 3 47.5 52.5 57.5 62.5 18.5 20 , 22. 10 30.5 35.5 40.5 1 45.5 65.5 55.5 1 3 i 50.5 55.5 1 60.5 ;:5:5 1 21 f 30.5 15 35.5 40.5 145.5 26.5 55.5 1 4 54.5 59.5 I 64.5 69.5 79.5 1 23 ~F .Ot ~ .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51

Rotary Actuator/Vane Type

Dimensions Page 73 V Free Mount Type Rotary Actuator with Angle Adjuster/Vane Type CRBU2WU Series How to Order Page 78 Construction Page 79 Dimensions Page 80 V Simple Specials Shaft Pattern Sequencing1 -XA1 to -XA24 Page 84 Shaft Pattern Sequencing2 -XA31 to -XA58 Page 90 DV Made to Order Page 96 V Component Unit Page 99 V Angle Adjustment Setting Page 100 V Auto Switch Mounting Page 102 51

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10 Symbol 2 Long Stroke -XB11 Available with long strokes exceeding the standard strokes. The stroke can be set in 1 mm increments.

Aluminum High Vacuum Angle Valve

type of heater.For further details, refer to mounting positions under Replacement Heaters on page 465. 423 B XLC/XLCV Series Dimensions XLCV/With solenoid valve R N P In case of double solenoid valve Port R (Exhaust port) Q K L M Port P (Pressure port) In case of single solenoid valve (mm) P K L M N Q R Model XLCV-16 XLCV-25 XLCV-40 36 14.3 9.2 6.4 3.5 2.7 17.3 41 15.8 9.2 6.4 3.5 2.7 15.8 51

High Vacuum Angle Valve

details, refer to mounting positions under Replacement Heaters on page 465. 439 B XLG/XLGV Series Dimensions XLGV/With solenoid valve R N P Port R In case of double solenoid valve (Exhaust port) Q K M L Port P (Pressure port) In case of single solenoid valve (mm) N K L M P Q R Model XLGV-16 XLGV-25 XLGV-40 6.4 14.3 9.2 3.5 2.7 17.3 36 6.4 15.8 9.2 3.5 2.7 15.8 41 6.4 29 9.2 3.5 2.7 2.6 51

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. 1. Use the product while strictly observing the precautions on vacuum equipment and taking the safety into consideration. Additionally, select a pad size and material suitable for the workpiece to be adsorbed and the atmosphere.

Ejector Valve Unit Series ZYY/ZYX

Silencer (AN203-KM81 pc) 51 26 16 2. Mounting bolt nut (M2 x 0.4 x 254 pcs.) 1095 Series ZYY/ZYX Ejector Valve Dimensions ZYX3L-S1-EC-MN Silencer Vacuum switch Ejector unit V Release flow rate adjusting needle Supply/Release valve P1 Circuit diagram 6.8 7.4 85 Accessory (packed together) 1. Silencer (AN203-KM81 pc) 51 26 16 2.

Clean Regulator/Fluororesin Type

54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator/Fluororesin Type SRF Series Dimensions/SRF30 Integrated fittings 41.7 Pilot port Rc, NPT 1/8 12 R ARJ 75 52 67.7 32.3 64 1 2 AR425 to 935 SMC ARX 4 x 5.5 (Mounting

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10

Configuration: 6 (3 Position Perfect), Sealant: 1 (Rubber Seal), Function: Standard (1W), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, 1: 1, Porting Specification: Side Ported, Port Size: 02 (1/4)

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (

Actuation: 4 (3 Position Exhaust Center), Seal: 0 (Metal Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: Dust Protected, Sub-plate: 02 (1/4 Port Size)