240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

NCA1

Quantity one set (4 pcs) of tie rods by mounting 5 Series NCA1 Cylinder Large Bore Dimension Drawings MX0 Basic style (B) P + Stroke 2-EE AA 4-DD KK MM B TH WF LF + Stroke TG ZJ + Stroke A E Bore Size (in) MM KK A AA B DD E EE LF+ P+ TG TH WF ZJ+ 500 (5") 1.000 3/4-16 1.13 5.80 1.500 1/2-20 5.50 1/2NPT 4.50 2.88 4.10 2.75 1.38 5.88 600 (6") 1.375 1-14 1.63 6.90 2.000 1/2-20 6.50 3/4 NPT 5.00

5 Port Air Operated Valve SYA3000/5000/7000 Series

(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1 2 x M5 x 0.8 (Pilot port) 13.6 B A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 2 x 4.2 (For manifold mounting) 19 42 (66) (52) 2 x 4.2 (For mounting) (5.5) 47.6 SYA7 20-02-(F2) 3 4 5 (49.5) (42.5) 30 1/4 (A, B port) 24.5 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA

3 Port Solenoid Valve

OUT port Symbol SUP/EXH port (Applicable tubing) Applicable tubing B01 M3 female screw M5 female screw Station 3 2 1 D side U side Stations 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations 3 1 Electrical entry 2 Grommet/Plug lead C How to Order Valve S070 B 5 B G Body type Electrical entry Body type Base mounted with screws G C Grommet Plug lead with light/surge

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

Heavy Duty Stopper Cylinder

MIW MIS 40 30 20 3.

NAAMS Standards Compliant

250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F G H I Model NAAMS code A B C D E F G H I CKZ-63A007 ACA007M 125.0 110.0 95.0 80.0 65.0 CKZ-63A008 ACA008M 155.0 140.0

Compact Cylinder with Solenoid Valve/

W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 [ ]: Values for 5 mm stroke with 32 < >: Values for

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA MU Contact protection circuit None DD-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Ejector Valve Unit Series ZYY/ZYX 1

20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply

Thermo-chiller/Rack Mount Type

Part number Applicable model A dimension [mm] Weight [kg] HRR010-m-20-mUY 330 HRR012/018-m-10-mUY 417 HRR012/018-m-20-mY HRR024/030-m-20-mY 506 HRR050-A-20-mUY 815 HRR050-W-20-mUY 637 HRR-KS001 Approx. 7 83 mm A Adjuster foot Caster (O.D.: 63) 303 mm 372 mm 494 mm 428 mm 544 mm Mounting view (HRR012/018-A) Anti-quake bracket A Anti-quake bracket B Hexagon nut Hexagon bolt Caster adjuster-foot

3 Position Cylinder Series RZQ

size (mm) Hole: CD H10 d9 A B CD CL CT CU CW 112.5 82.5 10 102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston

SYA3000/5000/7000

M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) VFRA 42 VA (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 SYA7 20-02-F2) 3 4 5 (49.5) (42.5) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

VXP21/22/23

Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

OUT reversal -T Element service indicator Accessories B 02 03 1 4 3 8 04 1 2 1 1 2 20 2B B B B Options AMD800 to AMD1000 (Self-standing style) AMD801/901 (Piping support style) 20 00 AMD 8 20 01 AMD 8 Port size Port size Body size Body size 8 20 2BFlange 30 3BFlange 20 2BFlange 30 3BFlange 8 9 9 10 40 4BFlange 40 4BFlange 60 6BFlange Style Style 00 With manual drain cock With manual drain

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8