0.01

Dimensions SFD100 different diameters SFD200 different diameters One-touch fitting dimensions(A, B) One-touch fitting dimensions(A, B) Port size q Port size w Port size q Port size w 4 8 4.5 5.5 SMC 6 10 Basic dimension 114.5 Basic dimension 72 5.5 4.5 Fitting dimension A Fitting dimension B Fitting dimension A Fitting dimension B 8 12 5.5 5 Total length 81 (A + 72 + B) 76.5 (72 + A) 81.5

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Compact Type Dual-Rod Cylinder Series CXSJ

+ Stroke) 56 + Stroke 8.5 44.5 + Stroke 7.5 8 + Stroke 16 4-M1.6 x 0.35 x 8 L 20 2-M5 x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 12 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth

CXS

SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore

CXS

Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through

CJ2X/CUX/CQSX/CQ2X/CM2X

W: Load (N) P0: Operating pressure (MPa) a: Piston area in the rod side (mm2) A: Piston area in the head side (mm2) Warning Since CJ2X, CUX10 are subject to internal leakage due to their construction, the speed may not be fully controlled with the meter-out controller () during low speed operation. 10-3-4 4 RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5

CJ2X/CUX/CQSX/CQ2X/CM2X

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM Model AS1001FM AS2051FM RS Q G Metric size 8 3.2, 4, 6 6 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" Inch size 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" RS H A Air flow (l/min (ANR)) 12 7 38 Controlled flow 0.2 0.1 Effective area

REC

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard port RHC (mm) MK(2) 2-7 A AL B B1 B2 D F FT FX FY FZ G H E Bore (mm) Stroke range Mounting hole 0 0.033 0 0.033 0 0.033 0 0.039 20 Up to 700 18 15.5 34 13 26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11

1

A vacuum pad is a consumable part, so it is warranted for a year after it is delivered. Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or failure due to the deterioration of rubber material are not covered by the limited warranty. Compliance Requirements 4.

SYJ300/500/700

SYJ72R is only for manifold use. 4-4-38 39 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.

Series 10-, 21- AW-B Filter Regulator

for maintenance G 1/4 Drain E CC A AW60-B 1021S N T D J J M U Applicable tubing 6/4 R C Q BB K H IN OUT P2 Pressure gauge (Option) 2 x P1 (Port size) (Pressure gauge port size) B Hexagon width across flats 17 Clearance for maintenance G 1/4 Drain E A CC Metal bowl 10-/21-AW20-B 10-/21-AW30-B to 60-B Semi-standard specifications Applicable model Model With bowl guard Metal bowl Metal bowl

C95

4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !

MXS

13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 Model F 25 25 40 50 38 50 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 MXS8-75 SMXS8A, #4(#1+#4) SMXS8A, #5(#2+#5) SMXS8A, #6(#3+#6+#7) SMXS8B, #3(#1+#3) SMXS8B, #4(#2+#4+#5) 82.5 132.5 3.11-14 Air Slide Table Series MXS With shock absorber (6) MXS8-llBS, BT, B 8 A

Gun Type Ionizer

current 0.8 A max.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated water) 2 port solenoid valve 1/4 (8A) 3 3/8 (10A) CAC406 (SUS) FKM (EPDM) 1/2 (15A) 1/4 (8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) OUT IN Viewing the graph To generate a water flow of 5l/min at a differential pressure of 0.1MPa, an effective area with Cv factor 0.35 (VCB , 3) or more is required. 3 4 100 VCB 10 Cv = 2.1 3 4 VCB 7 Cv = 1.38 3 4

VCB

y Return spring Stainless steel CAC406 u Body Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators C 5 C Max. 4 20 4 Without stroke adjuster 2 x M4 x 0.7 depth 6 G Max. 3 M 7.5 Stroke: S C 2 x M3 x 0.5 depth 4 11-/22-MXP12-15 A Width across flats 2 H 14 Width across flats 7 Piping port 4 x M4 x 0.7 depth 4.5 17.8 M4 x 0.7 8.5 2 x M5 x 0.8 8 4 (Plug: MGP12-08-CA001-R) 4.2 25 24 8.5 A 0 +0.030 depth 3 3 3 0 +0.030 depth 3 1.5 19 220.05 4 x

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA

Wireless System

14 A B A 14 A B A B A 14 A B A 14 A B 3 2 3 2 A 14 U side D side D side U side 0 1 0 1 5 4 5 4 2 3 2 3 B 12 B 12 B 12 B 12 B 12 7 8 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-DXPD 1 set EX600-DYPB 1 set EX600-WSV1 1 set EX600-EU1 1 set SS5Y3-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations