Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LVQ L1 L2 H G F M Y E B LQ 2 11.5 18.5 LQ1R1A-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 8 4 18.5 10 16 1/8" LQ1R4C-F LQ1R4B-F LQ1R4A-F LQ1R3D-F LQ1R3C-F LQ1R3B-F LQ1R3A-F LQ1R2F-F LQ1R2E-F LQ1R2D-F LQ1R2C-F LQ1R2B-F LQ1R2A-F LVN 18.5 1/8" 19.5 TI/ TIL 4 16.5 14 12 6 28 15 21.5 1/4" 22 PA 21.5 1/4" PAX 24 5 23 17 18

MK

Therefore, make sure to install the arm in the direction indicated in diagram A. 4.1-9 Series MK 32, 40, 50, 63 Through hole (Basic)/MKB Both ends tapped/MKA Model MKA MKA50 MKA63 A B 32 40 M6 X 1.0 10 M8 X 1.25 14 M10 X 1.5 18 S Model A G I J Q U X T B H K L O V Yh9 Z C P D E R F 0 0.062 0 0.062 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0.15 0.15 MKB32 31.5 9 Depth 7 M10 X 1.5 93.5 71.5 Rc(PT)1/8

53

A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) When multiple options are combined, indicate symbols in alphabetical order.

JA/JAH/JB/JS

: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ Accessory Dimensions MI W S Rod end nut (mm) CEP1 d: Thread nominal size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

CQS

Bore (mm) Stroke range (mm) A 25.5 25.5 29 32.5 I OB K Q L RA M RB N T C OA D E F H B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 M3 X 0.5 M4 X 0.7 M5 X 0.8 M6 X 1.0 M4 X 0.7 M4 X 0.7 M6 X 1.0 M6 X 1.0 32 38 47 52 6.5 6.5 9 9 5 6 8 10 7.5 7.5 9 11 3.5 3.5 4.5 5 7 7 10 10 15.5 20 25.5 28 4 4 7 7 3.5 3.5 5.4 5.4 0.5 0.5 1 1 6 8 7 12 6 8

MXQ

F 6.5 14 4-M5 x 0.8 thread depth 7 2 N 1 x F 21 3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4

1

40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

NAAMS Standards Compliant

250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 [mm] [mm] Model NAAMS code A B C D E F G H I J Model NAAMS code A B C D E F G H I J CKZ-63A031 ACA031M 125.0 110.0 95.0 80.0 65.0 CKZ-63A032 ACA032M 155.0 140.0 125.0 110.0 95.0 80.0 65.0 CKZ-63A033 ACA033M 185.0 170.0 155.0

C95

16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) -X 32 34 216 88.5 18.3 M6 x 1 4 6 27 164 6.5 4 M10 x 1.25 G 1/8 37 48 13 6.5 40 39.5 240 96.5 19.5 M6 x 1 4 6.5 27 182 8 4 M12 x 1.25 G 1/4 41.5 54 16.5 9 2050 47 268 111.2 22.4 M8 x 1.25 5 8 31.5 195

Flame Resistant

How to Order AS 2 2 0 1F G 01 06 W2D Flame resistant flat head screwdriver adjustable Body size 2 1/8, 1/4 standard 3 3/8 standard 4 1/2 standard Applicable tubing O.D.*1 Metric size 06 6 08 8 10 10 12 12 Elbow Control method 0 Meter-out 1 Meter-in *1 For selecting applicable tubing O.D., refer to the Model shown above.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication y t r q e y t w w r w q e y e q t r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) X X 1(P) 21 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

EtherNet/IP is a trademark of ODVA. 574 Gateway Unit LEC-G Series Wiring Example Power supply plug for LEC-G: LEC-D-1-1 * Power supply plug is an accessory.

Profile Design ISO/VDMA Air Cylinder Series CP95

0.3 F (front) 0.4 0.5 0.6 0.7 0.8 0.9 1 *) *) *) *) *) *) 0.2 G (rear) 0.3 1160 1360 0.4 940 1160 1350 0.5 1080 830 1020 1190 0.6 770 980 750 920 1080 0.7 700 900 680 850 990 0.8 650 830 630 780 910 0.9 610 790 590 740 860 1 *) 580 740 560 690 810 L F (front) F (rear) L 0.2 0.3 F (front) 0 .4 0.5 0.6 0.7 0.8 0.9 1 *) *) *) *) *) *) G (rear) 0.2 0.3 0.4 0.5 0.6 1010 1380 0.7 1020