Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40 Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6(
Page 30 [F 4] [inP] External input [oFF] Unused Page 31 [F 5] [Eco] Power saving mode [oFF] Unused Page 36 [F 6] [Pin] Security code [oFF] Unused Page 37 [rAn] Select connected sensor [oFF] Unused [F95] Page 38 [Uni] Unit selection function [LPm] L/min [F99] [ini] Reset to the default settings [oFF] Unused Page 40 -23No.PF-OMN0005-E [F 0] Auto-preset This function is capable of calculating
Contact P/A regarding the specifications for PSI unit and F .
/h) (282 m3/h) (420 m3/h) (570 m3/h) dew point Standard Outlet air condition 45oF 155SCFM 215SCFM 314SCFM 406SCFM Air flow capacity pressure (7.2oC) (264 m3/h) (366 m3/h) (534 m3/h) (690 m3/h) (ANR) dew point (Note2) Outlet air 50oF 177SCFM 251SCFM 353SCFM 459SCFM pressure (10oC) (300 m3/h) (426 m3/h) (600 m3/h) (780 m3/h) dew point Rated Inlet air pressure 100 psi (0.7MPa) condition Inlet
Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
x 0.5 (Mounting thread) 4 x 4.5 (Mounting hole) Silencer (P2) Foot F (Option) (Option: N) (Except VEX3120) Hexagonal socket M3 x 0.5 x 8 (2 pcs.)
x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1 m3 Y = x (mn x yn) 1 7.025 = (0.88 x 0 + 4.35 x 0 + 0.795 x 111 + 1.0 x 210) = 42.5 mm 1 m3 Z = x (mn x zn) 1 7.025 = (0.88 x 5 + 4.35 x 42.5 + 0.795 x 42.5 + 1.0 x 42.5) = 37.8 mm 4 Calculation of Load Factor for Static Load m3: Mass m3 max (from 1 of graph MY2H / m3) = 22.5 (kg) . m3 Load factor a1 = m3 / m3 max = 7.025 / 22.5
Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
Table Deflection (Reference Values) Table displacement due to pitch moment load Table displacement due to roll moment load Table displacement due to yaw moment load Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
How to Order Manifold VV5F 3 40 02 2 05 Common exhaust F Series Stations Thread type 02 Nil Series P, R port size A, B port size 2 stations Rc Symbol F N T 3 5 1/4 3/8 1/4 1/4 G VF3000 VF5000 xx 20 20 stations NPT NPTF Up to 10 stations for VV5F5. The A and B ports are made on the bottom.
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: MN (M Plug Connector w/o Lead Wire), Surge Suppressor: None, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: S (5VDC), Lead Wire: LN (L Plug Connector w/o Lead Wire), Surge Suppressor: None, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: S (5VDC), Lead Wire: LN (L Plug Connector w/o Lead Wire), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: None, CE Marked: Q (CE Marked)