Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Positioning Operation Pushing Operation ON OFF ON OFF IN IN Input Input 15 ms or more Output the step data no. 15 ms or more Output the step data no.

CRQ2

CAT.ES20-147 A Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

Table of Contents

Action D Double acting Standard stroke (mm) Port thread type 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Nil TN TF Applicable Auto Switches/Refer to page P.68 to 72 for further information on auto switches.

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

51

2 Up to 200 14.5 17.5 17.5 23.5 29 29 38 45.5 54 63.5 79 96 13 17 17 19 27 27 14 16.5 20 26 32 38 8 10 12 14 16 18 8 10 12 14 18 18 12 14 18 25 30 32 12 12.5 11 10.5 15 15 6 7 7.5 7.5 12 12 5 6 6 8 11 11 26 31 38 47 58 72 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 Width across flats 6 length 3.5 14 16 20 22 25 30 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 JMB

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

JA/JAH/JB/JS

-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Vacuum Pad

10 10 1.5, 2, 3.5 # # # 114.5 59 15 15 4, 6, 8 10, 13, 16 # # 66.5 20 20 # # # # # 124.5 25 25 Wide selection of piping For 2 piping!

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 2 70 kPa 0 kPa 0 0 2 4 6 8 10 0 0 1.0 3.0 2.0 4.0 5.0 Flow [L/min] Flow [L/min] PF2M725(-L) 25 L/min PF2M750(-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80

Cylinder with Lock Series CLS

Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ... Same side 15 110 1pc. 35 110 Different side 2pcs. 55 110 Same side D-A44 35 + 30 (n 2) 110 + 30 (n 2) n = 2,4,6,8...

CNS

40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) C EA A AL B BN BP BQ CL D E F FA G GA GB GL GR J K KA 125 140 160 16 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 15 31 30 to 1000 18.5 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 17 36 35 to 1200

MB1

30 42 42 14 14 20 20 30 30 10.5 11 15 15 23 23 154 158 182 182 228 228 13 13 17 17 26 26 CX U L Z + Stroke RR ZZ + Stroke Without air cushion Overall length of front/rear flange, single/double clevis, and method for longitudinal mounting When there is no air cushion, the unit is equipped with rubber bumpers.

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-20. 12.5 15 15 10.5 12.5 15 15 10 23 23 12.5 15 12.5 15 15 17.5 15 17.5 15 17.5 15 17.5 9 17.5 14 16 22 23 23 24 22 23 23 24 Note 2) For 25 stroke, the shock absorber is mounted on a single side of the plate.

Floating Joint

42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25