MY2

4 #1@3@9 !5@8 @7 %5!

Fieldbus system PROFINET compatible SI Unit

, 1: Module 4 has an error 4 Module 5 error 0: No error or not connected, 1: Module 5 has an error 5 Module 6 error 0: No error or not connected, 1: Module 6 has an error 6 Module 7 error 0: No error or not connected, 1: Module 7 has an error 7 Module 8 error 0: No error or not connected, 1: Module 8 has an error Valve diagnostics 1 Table. 5-4 Valve diagnostics 1 Bit Description Explanation

HRL

Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to

44

O.D. 1/8" (3.18) 0.086" (2.18) KFG2H0122-00 7 1.1 8 21.8 5 1.5 8 2 x Applicable tubing H1 H2 H2 0.098" (2.5) 5/32" (4) KFG2H0325-00 7 1.6 8 21.8 5 1.8 8 d 1/4" (6.35) 5/32" (3.95) KFG2H0704-00 16 6 12 25.2 6 3.3 12 5/16" (8) 0.236" (6) M L M KFG2H0906-00 25 17 14 28.6 6.6 5.3 14 3/8" (9.53) 1/4" (6.35) KFG2H1163-00 45 19 17 33.6 7.6 5.6 17 1/2" (12.7) 3/8" (9.53) KFG2H1395-00 55 51 19 37

Digital Gap Checker ( compatible)

Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1 m, 3 m, 5 m Piping length: 1 m, 3 m, 5 m : In the default condition, the value can be displayed as 0. : In the default condition, when the distance is below 9, 0 will be displayed.

energy saving effect

A 14 17 21 25 Rated power consumption Note 5) kW (kVA) 4.2 (4.7) 5.3 (5.8) 6.6 (7.0) 8.0 (8.4) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 61 60 61 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Note) For details of alarm codes, refer to the Controller Operation Manual. (2) (1) 5 - 4. TEST Drive / Step No.0 No.1 No.0 a.

Slider Type Ball Screw Drive/11-LEFS Series

5 5 Rated voltage [V] 24 VDC 10% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders.

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

LEC-OM034xx

Q_Address bit 7 6 5 4 3 2 1 0 1 ID5 ID4 ID3 ID2 ID1 2 (6) Return of the final station number Indicates the range of the ID of the controller (LEC) to communication when the initial is processed. ID number is set in binary digit. Input range is from 1 to 5. If the set value is lower than 0 or larger than 5, 5 is set. ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 45 - 13.

EXxx-OMN0029CN

1 2 3 4 5 6 7 / byte1 Bit No. 0 1 2 Reserved 3 () 4 () 5 6 7 byte2 Bit No. 0 Reserved : : 7 Reserved byte3 Bit No. 1 0 1 1 2 2 2 3 4 SI 5 Reserved 6 Reserved 7 Reserved 1Bit0 1 ON 2Bit2 3 ON -63No.EX-OMN0029CN-D byte0 Bit No. 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 byte1 Bit No. 0 8 1 9 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -64No.EX-OMN0029CN-D

Series IDG

to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) (23 to 131F) Note 1) 5 to 50C 5 to 55C (23 to 131F) (23 to 131F) Note 1) 5 to 50 C 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 15C (-5F) 56 (2.0) 111 (3.9) 222 (7.8) 335 (11.8) 560 (19.8) 830 (29.3) 1110 (39.2) 665 (23.5) 28 (1.0) Outlet air flow rate l

LEC-OM036xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

Rotary Table/

5 !4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

MY1

impact: P = 0.5MPa For 40 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 Impact speed (mm/s) Impact speed (mm/s) L-unit 1000 1000 Air cushion 500 400 300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

EXxx-OMU0020CN

LED 4M12 (5 ) . 8-1 EX245-DY1 56 No.EX-OMU0020CN 8.2. . 8-1 EX245-DY1 (WLH) mm 5412061 280 g PBT DC24 V SI US2 1.6 V 50 mA 4 x M12 5 (2 /) 0.5 A / 1 2 A / 1 1 8 PNP 57 No.EX-OMU0020CN 8.3. M12 5 . 8-2 EX245-DY1 TOP View 1 N.C. 2 2 n+1 3 5 1 3 0 V ( / ) 4 4 ( n) 5 FE/ SI IP65 IP65 8.4.

E-P HYREG ® Series VY1

-6 A 1 1 1 1 0 2.5 5 7.5 10 V 0 2.5 5 7.5 10 V 0 2.5 5 7.5 10 V VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa

OMR0031

Note 5) Cables are not included. 15 - 3.2 2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580