HRX-OM-R005

-2 2.3 Function of Parts . 2-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical

CRB2/CRBU2/CRB1

W1 = L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 6.5 to 14 X-3 L1-1 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 Y-1.5 L2-1 0.5 to 2.5 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 Y-1.5 L2-1 6 to 20 0.5 to 3 9 to 20 X-4.5 L1-1 0.5 to 3 X = 30 30 0.5 to 4 Y-2 L2-2 8.5 to 22 0.5 to 4 X-5 L1-2 11.5 to 22 W2 = 40 40 0.5 to 5 Y-4.5 L2-2 13.5 to 30 0.5 to 5 15.5 to 30 X-5.5 L1-2 29 Series CRB2 Axial: Top (Long-shaft

HRX-OM-W038

-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-O021

-2 2.3 Function of Parts . 2-3 2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2(B) port SMC 79 X PE 41.5 30.5 32 27 R1 R2 P 15.5 14.5 G1/2 Electrical entry 19.5 19.5 (21) Rc 1/8 External pilot port Rc 1/8 PE port (21) 31 31 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port ( ): Rc 3/8 3 position double check: VQ460 0 1 2 position double: VQ420 3 position closed center: VQ430 3 position exhaust center: VQ440 3 position pressure center: VQ450 0 1 0 1 0 1 0 1 181 108

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4 Plug connector

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-3-A10 VS7-3-B04 VS7-3-B06 3/8 1/4 Piping specifications Symbol A02 A03 A04 A06 A10 B02 B03 B04 B06 Size 2 Size 3 Size 1 Horizontal 3/8 Side-ported 1/4 0.37 3/8 1/4 Side-ported 3/8 Bottom 3/8 Side-ported 1/2 3/8 Side-ported 3/4 0.68 1/2 Horizontal Side-ported 1 1.29 3/4 Bottom-ported 1/4 3/8 Bottom-ported 3/8 0.68 1/2 Bottom Bottom-ported 1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.a Station 3 3 3 3 Station 1 SOL.b SOL.a Station 2 SOL.a Station 2 2 2 2 SOL.a SOL.a Station 1 SOL.a Station 1 1 1 1 Triangle mark Triangle mark Triangle mark The common polarity should be the same as the common specifications of the valve to be used.

HRX-OM-I051

-16 1.7.4 Lavel . 1-16 1.8 Material Safety Data Sheet (MSDS) . 1-16 Chapter 2 Name of Each Section . 2-1 2.1 Name of Each Section (1) . 2-1 2.2 Name of Each Section (2) . 2-2 Chapter 3 Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation

Plug-in Unit

input no. 1, 3, 5, 7.

JXCx-OMT0002

[Setting example] (1) Axis 1: 1, Axis 2: 2, Axis 3: 2, Axis 4:3 The order of returning starts from Axis 1, then Axis 2 and 3, and then Axis 4. ORIG order 1 to 4 X (2) Axis 1: 1, Axis 2: 1, Axis 3: 1, Axis 4:1 Four axes return simultaneously. Caution Simultaneous return to origin of 4 axes is not synchronous. Adapter file version Fixed value This is a fixed value for this controller.

JXCx-OMT0001CN

-5No.JXC-OMT0001CN-C JXC93 Series/ 1. / 1 1.5 *3) *3)1 1 -6No.JXC-OMT0001CN-C 2. 2.1.

JXCx-OMY0004

Alarm was generated in order of (1) -> (5) 16 Alarm 1 17 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 18 Alarm 3 Alarm 2 0 (1) (2) (3) (4) Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. Refer to 15.3. Alarms and countermeasures (P.66) for detailed alarm information. 19 Alarm 4 5 Please refer to 20.

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

VM

1 !2 NBR NBR !3 !