Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB
(mm) Mounting (Male thread) M5 x 0.8 Vacuum entry port Mounting Connection 20 M8 x 1 Female thread Male thread 10 to 16 24 M10 x 1 M8 x 1 20 to 32 10 to 16 55 M14 x 1 M10 x 1 M5 x 0.8 40, 50 20 to 32 Pad diameter (mm) M14 x 1 40, 50 Ball joint rotation 15 Pad Type Pad form Ball joint type Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 Material Urethane rubber NBR Silicon rubber Fluoro rubber
KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 14 14 14 14 14 14 14 9 9 9 13 13 13 13 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 D 2 Connection thread H1 A L1 Reference dimensions after R thread installation. 862 Nozzles for Blowing KN Series Sensing
1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.
1 !2 !3 !8 !9 @0 @1 @2 @3 D-9 Hard anodized Oil impregnated Oil-impregnated sintered alloy High carbon chrome bearing steel High carbon chrome bearing steel Carbon tool steel Carbon steel Phosphate coated 8-3-9 10 Series MXU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W ( ): Denotes the values of D-A93.
1 !2 !3 !8 !9 @0 @1 @2 @3 D-9 Hard anodized Oil impregnated Oil-impregnated sintered alloy High carbon chrome bearing steel High carbon chrome bearing steel Carbon tool steel Carbon steel Phosphate coated 8-3-9 10 Series MXU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W ( ): Denotes the values of D-A93.
Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, VV5Q51/55 BASE MT 1/2, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 13.93321 lb
Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 16.3142 lb. RP.
0 535 LLB3 LLB4 5 100 5 107 IDFA Min. measured flow rate value Max. measured flow rate value 50 500 55 IDFB Connector pin numbers IDH 4 3 ID IDG 2 1 IDK Pin no.
4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4
relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4
VX VX3 VXA VN LVC LVA LVH LVD LVQ Variations LQ LVN TI/ TIL Pilot port " ## Valve PA , 1 & ' (!)* (!+ $ $!%! PAX PB Model %# & 0 & VXA3114 VXA3124 VXA3134 VXA3224 VXA3234 VXA3244 , 1 , / , 1 , / , 1 , / , / . 1 , / . 1 , / . 1 ,!* )!).)!)./ Material 17-3-101 The VX series will be revised shortly.
unit: kPa 6: Cannot be selected for 1 station. 7: At the factory, the options are not attached to the product, but packed together with it for shipment. 8: Refer to 8 (page 10). 9: DIN rail must be ordered separately. 10: About the number of brackets. 1 station: 1 piece is packed More than 2 stations: 2 pieces is packed -8No.PS-OMT0002-E 2 About this product With control unit -9No.PS-OMT0002
Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated 11 Nut PFA y r t !1 q u !0 o i Integral ttings/LQ1 w e Component Parts No.
LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)
Internal C 13 38 57 83 161 267 gripping force Open/close stroke (Both sides (mm) 4 6 10 14 22 30 230 420 715 1,275 Note 2) Weight (g) D 55 115 SC 235 425 760 1,370 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2. Operating method or operation 2-1. Design precautions Warning 1.
Doc. no.XL-OMO0001-A Contents Safety Instructions 1 1. Product Specific Precautions 1 3 (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2. Product Specific Precautions 2 5 (Maintenance parts) 3. Specifications 6 4. Construction/ Dimensions 8 5. Guaranteed term and range 9 6.
Thread type and port size C D E Material Number of 1 set Male thread A side Female thread B side Mounting hole dia.: 10.5 IDF-AP604 NPT1 Rc1 1.97 (50) 1.06 (27) 1.81 (46) [inch (mm)] Brass 2 IDF-AP606 NPT1 1/2 Rc1 1/2 2.17 (55) 1.22 (31) 2.13 (54) Part no.
66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.
ITV209 1.3 to 80 kPa 14-8-30 1 4 Pressure controlled steplessly by electric signals / IC Panel mount adapter set Display protective cover 14-8-35 M5 female (Built-in sensor type) Converts digital input signal into analog output signal Controller for electro-pneumatic regulator IC VBA VE to 1 2 1 4 0.2 to 2.0 (VBA1110) 0.2 to 1.0 (VBA4200) 14-9-1 Booster regulator VBA1110-4200 Pressure gauge