3 Port Solenoid Valve Metal Seal Series VZ200 1

(Normally open) 2 01 Body ported Rc 1/8 Without sub-plate Rc 1/8 Base mounted 01 Nil Light/Surge voltage suppressor V100 Body type Nil None Rc 1/4 02 SY Z With light/surge voltage suppressor (Indicator light is not available for grommet type.)

VZ5000

-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

CL

41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

LFE-OMY0008

[F20] 45 [F22] 46 OFF [F30] 47 OFF[] [F32] 48 OFF[] [F33] 50 FR0 [F34] 51 OFF [F80] 52 [] [F81] 53 OFF [F82] 54 [*] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

Manifold Specifications

VQ7 0.1 to 1.0 MPa EVS How to Order VFN VV5ZS3 1 08 01 5 AP D 51F Coil voltage of air release valve Series VZS3000 Manifold Note) How to take out the lead wire of air release valve is the same method as the other valve equipped on the same manifold.

Compact Cylinder with Air Cushion and Lock Series RLQ

55 + Stroke 18 91.5 Special cap bolt 46 CLJ2 5 4 x 11 95 3.2 9 16.2 9 16.2 CLM2 113 70 + Stroke 122.2 + Stroke CLG1 CL1 MLGC Rod end nut 43.5 CNG Rod flange style: RLQF63 MNB CNA 60 80 CNS 9 4 x 9 92 41 55 + Stroke 18 108 CLS 114 + Stroke CLQ RLQ 43.5 Rod end nut MLU Head flange style: RLQG63 MLGP ML1C 80 60 41 55 + Stroke 9 8 92 4 x 9 113 + Stroke 108 Rod end nut 43.5 Double clevis style

Compact Cylinder with Air Cushion and Lock Series RLQ

9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25 Cap bolt Double clevis/RLQD63 8 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 12

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

RLQ

ML1C Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

Related Products: Holder Series TMH 1

Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

Related Products: Holder Series TMH 1

Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

HEC-OM-S008

] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Digital Flow Switch (Remote type monitor unit)

Panel mount adapter (Part number: ZS-26-B) Front protective cover (Part number: ZS-26-01) 1: The panel mount adapter can be rotated through 90 degrees for mounting. 2: The panel mount adapter should be fixed firmly with screws. Otherwise, fluids such as water may enter. After contact with the panel, tighten screws by 1/4 to 1/2 turn.

LFE-OMZ0013

Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37 F20 External input 41