Compact

, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1 0.10 ST 15, 20 ST 15, 20 0.15 0.10 ST 5, 10 0.05

A

40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41 Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

Series AP500

1.0 MPa) (Source pressure 1000 psig or less) 1) Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 2300 psig(15.9 MPa) Vacuum to 300 psig (2.1 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.45 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m)

Vacuum Ejector Series ZM

Air consumption 120 60 60 100 50 50 80 40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021

CNG

surface Port surface Port surface Switch type D-C7/C80 10 st or more 15 to 49 st 50 st or more 10 st or more 15 to 49 st 50 st or more D-H7/H7W D-H7BAL/H7NF 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 60 st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 15 to 74 st 65 st or more 10 st or more 15 to 64 st 15 to 74 st 65 st or more D-B5/B64/G5NTL 10 st or more 15 st

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

Environment

60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note 4) Note 5) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 Speed [mm/s] Note 5) 18 to 400 9 to 200 5 to 100 24 to

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

or less 0.43 Closed center VFS3330 VFS3320 600 40 or less 0.45 Exhaust center VFS3430 VFS3420 600 40 or less 0.45 Pressure center VFS3530 VFS3520 600 40 or less 0.45 Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

ITV

VBA VBAT AP100 841 Series ITV009 Dimensions Manifold 27.5 40 40 27.5 4 x M3 x 0.5 thread depth 3.5 Mounting hole 11 11 25 L1 L2 Port Location z x c 8 No.

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

MU

197 235 30 46 83 IN 25 12 15 Cushion Rubber bumper 650 218 283 348 413 42 88 153 IN 32 14 24 Thread tolerance JIS Class 2 1056 366 472 578 683 56 155 261 IN 40 16 30 Equivalent tube I.D.

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

7

For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

40 A 42.5 32.5 A 19 19 22.5 Stroke + 95 64 123.5 123.9 Stroke + 169 Upper: Incremental encoder Lower: Absolute encoder Dog fitting for switch 40 10 30 5 Work piece mounting reference plane 15 30 33 2 Pitch = 100 17.5 (n1 1) x pitch 47.5 60 21.5 Body mounting reference plane Section AA The body mounting reference plane and work piece mounting reference n1 Stroke Model plane should be

Compact Cylinder

, 30, 35, 40, 45, 50 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Other intermediate strokes can be manufactured upon receipt of order.

VFS

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

CNG

surface Port surface Port surface Switch type D-C7/C80 10 st or more 15 to 49 st 50 st or more 15 to 49 st 10 st or more 50 st or more D-H7/H7W D-H7BAL/H7NF 10 st or more 15 to 59 st 60 st or more 15 to 59 st 10 st or more 60 st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 15 to 74 st 65 st or more 15 to 64 st 15 to 74 st 10 st or more 65 st or more D-B5/B64/G5NTL 10 st or more 15 st

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 9.4 3-5H10 depth 5 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.