Piping: Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 12 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 15 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 16 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: NPTF1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: NPTF1/8

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

VEX1

N Port size A Model B C D K N O Q R S T U E F G H I J L M P Port 2 (A),1 (P) Port 3 (R) VEX5510 VEX5511 160 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 x 1 x depth 9 116.5 50 25 10 7 25 173 80 60 98 Center , ,1 25 VEX5710 VEX5711 17 82 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 x 1 x depth 6 136.5 1 4 1 4 1,1 1 Bracket mounting dimensions Grommet

Information

When it is OFF (alarm occurs), stop the sequencer signal using the sequence program. 13 Series LECSm Control Signal Wiring Example: LECSS 10 m or less 10 m or less LECSS Note 4) Note 4) Note 2) CN3 CN3 24 VDC MBR DICOM 5 13 RA1 D0COM 3 Electromagnetic brake interlock Note 2) RA2 9 INP Forced stop EM1 20 In position D11 2 Upper stroke limit (FLS) 15 ALM RA3 Failure Note 3) D12 12 Lower stroke

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

Air Cylinder

62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.