39

Release point Y LB (mm) Bore size (mm) LB Y 50 63 78.4 132 Cover open 78.4 138 7 Series CKZ3N Dimensions Arm / 50 Straight-Plain 20 mm Offset-Plain 16 200.03 200.03 A M61.0 A M61.0 R45 33 530.05 6.5 32 6.5 10 19 R25 10 R25 19 18 R6 19 18 R6 19 A 90.0 120.0 150.0 A 90.0 120.0 150.0 Weight kg 0.6 0.7 0.9 Weight kg 0.7 0.8 1.0 Part no. CKZ-50A001 CKZ-50A002 CKZ-50A003 Part no.

Prevents Micro-Bubbles

17.5 37 26 38.5 78.5 Rc 3/8, 1/2 NPT 3/8, 1/2 LVA4 46 60 16 54.5 18 47.5 33.5 47.5 M8 x 1.25 95.5 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 1/2, 3/4 NPT 1/2, 3/4 LVA5 58 75 19 61.5 27.5 60 43 55.5 M8 x 1.25 122.5 Rc 1 NPT 1 LVA6 58 85 24 69 27.5 43 63 60 M8 x 1.25 130 17-5-20 18 Series LVA Threaded Type Dimensions Body material: PPS Basic type VC A D L VDW VQ 4-M K VX2 VX Courtesy of Steven Engineering

Manifold Type: Body Ported, Valve Stations: 20 Stations, A, B Port: NPT, CE Marked: -

Passage: Common SUP,Common EXH, Stations: 20 Stations, Thread: NPT

Manifold Type: Body Ported, Valve Stations: 20 Stations, A, B Port: NPT, CE Marked: -

Piping: Body Ported, Bar Manifold, Individual Wiring, Stations: 20 Stations, Port Size: None, Thread: NPT

Manifold Type: Body Ported, Bar Manifold, Individual Wiring, Valve Stations: 20 Stations, A, B Port: NPT, Q: -

3 Port Solenoid Valve Metal Seal Series VZ200 1

-2 to 4-18-6.

HRL

refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 1.4 2.2 3.0 Control method PID control Ambient temperature [C] 2 to 45 Circulating fluid CH1: Tap water/CH2: Tap water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated flow

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

20 MIS12-20D 10, 20, 30 mm -X 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 w i !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 q y r !

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

REC

1/4 11 181 18 270 281 Double clevis style: RECD 2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1 0.2 K A U CZ N N F S + Stroke H L NA Z + Stroke RR ZZ + Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 Up to 700 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 25

2/3 Port Valve

-40F VND70D-50A VND70D-50F 7 0.7 1 1.3 3.8 5 8 12 13 0.3 1 8 1 4 18 23 70 90 140 220 3 8 0.6 15 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 1 4 1 32 18 320 32 1 2 1 28 40 500 40 2 50 43 770 50 Note 1) The companion flange is JIS B 2210 10K (Standard) or its equivalent.

REC

M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

CUJ

38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L 5 5 18 M3 x 18L 5 5 18 M3 x 18L

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

+0.1 23 2 34H9 +0.062 depth 4 0 27 Misc. 30 4-M6 x 1 thread depth 7 (Thread for mounting attachment) Rc 1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D