Clean Rodless Cylinder Series CYP

Cleaned, assembled, inspected and double packaged in a clean room 10 Particle concentration (particles/m) Class M3.5 [Class 100] 10 10 Long strokes Class M2.5 [Class 10] 10 Long strokes are made possible by a special cylinder tube that does not bend.

10-SYJ3000

locking slotted type Coil type M5: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

Series

For manifold type 31, S31, 32, S32 5 port (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 Electrical entry 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC E: Push-turn locking lever type Grommet L plug connector M plug connector M8 connector WO: Without connector cable M: With lead wire (

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

RB/RBL/RBQ

x 1.0 19 M5 9 drill, 14 counterbore depth 8.6 16 12.5 34 54 M14 x 1.5 25 M8 11 drill, 17.5 counterbore depth 10.8 22 19 44 70 M20 x 1.5 38 M10 13.5 drill, 20 counterbore depth 13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

IDX-OM-W011

L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011

Digital Flow Switch Series PFA For Air Series PFW For Water

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 14 For Air Digital Flow Switch Series PFA 4. Output Specification Selection Mode For For Flow rate setting SET SET Press the SET button.

IDX-OM-O004C

) AC200,220V(60Hz) 3) (50/60Hz) W 420/480 (50/60Hz) A 4.3/4.6 3.4/3.1 4 ) A 10 R134a(HFC) () Rc1 kg 46 1 2 () kW 15 1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41 54 300 16 C R 1 C R 1 87 578 [AC200V] [AC200V] 396 0.8m (10, (:10, :0.8m) 43 15 270 13 4x 380 101 258 314 [AC100V] (:1.9m [AC100V] [AC200V] (17) [AC200V] ( 17) 1.9m 6.3 IDF15E1-10 PC CM ILS FM PTC

Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

EX500-GPR1A.eng

Installation ( unit: mm ) Dimensions ( unit: mm ) Thread mounting EX500 body * Tightening torque : (1.5 0.2 ) Nm 4 M5 COM D COM C COM B COM A 24VDC OUT IN BUS Cutout Dimensions for Mounting (Tolerance: 0.2) DIA BF SOL RUN 136 160 GATEWAY UNIT EX500 SERIES 148 PE 10 46 88 49.9 EX500-GPR1A 68 5 8 9 Storage ambient temp -25oC to 70oC ID Number 1405 ( hexadecimal ) Freeze mode/Sync mode Supported

Speed Controller with One-touch Fittings Series AS In-line Type 1

32 35.6 40.6 9.8 71.6 18.5 10 21 42 33.3 38.3 7.4 59 13.2 17 1/4" AS3001F-07 AS3001F-12 33 36.8 41.8 11 76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F

IDX-OM-Y002

Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications. 10-1 10.3 Connection of power supply . 10-2 10.4 Handling Precautions of the Earth Leakage Breaker . 10-2 10.5 Electrical circuit diagram . 10-2 Chapter 11 Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

XL-OMY0002

15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

XL-OMY0001

-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

High Pressure Coolant Valve

-15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth

Manifold Regulator ARM1000/2000 Series

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 OUT 2 10 1.0 MPa Not able to set the pressure

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M5 (Base Mounted M5X0.8)