Compact Cylinder

26 19 17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

Electric Actuators

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

33 41 65 31 39 64 30.5 34.5 30.2 34.2 35.2 30.2 34.2 35.2 30.2 34.2 35.2 35.8 36.8 39.8 35.8 36.8 39.8 36.3 37.3 40.3 36.3 37.3 40.3 23.8 26.5 28.5 26.2 28.2 28.9 26.2 28.2 28.9 26.2 28.2 28.9 29.8 30.5 31.6 29.8 30.5 31.6 30.3 31 32.1 30.3 31 32.1 4 2.5 14 10 14 17 12 14 17 12 14 17 27.8 23.5 27.5 28.5 23.5 27.5 28.5 23.5 27.5 28.5 28.5 29.5 32.5 28.5 29.5 32.5 29.5 30.5 33.5 29.5 30.5

KF

25 36 16 25 37 16 24 36 32 40 65 31 39 64 33 41 65 31 39 64 30.5 34.5 30.2 34.2 35.2 30.2 34.2 35.2 30.2 34.2 35.2 35.8 36.8 39.8 35.8 36.8 39.8 36.3 37.3 40.3 36.3 37.3 40.3 23.8 26.5 28.5 26.2 28.2 28.9 26.2 28.2 28.9 26.2 28.2 28.9 29.8 30.5 31.6 29.8 30.5 31.6 30.3 31 32.1 30.3 31 32.1 4 2.5 14 10 14 17 12 14 17 12 14 17 27.8 23.5 27.5 28.5 23.5 27.5 28.5 23.5 27.5 28.5 28.5 29.5 32.5

Air Cylinder Series MB

19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 12 16 19 24 34 34 34 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Wedge Cam Operation Provides

16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

20 105 MHKL2-12S Normally open Normally closed Without magnet MRHQ 16 17 14 14.6 28.6 165 MHKL2-16S EPDM seal/Fluorine grease 20 32 18 16 34 314 MHKL2-20S Fluorine grease MA 25 53 22 19 41 565 MHKL2-25S Finger: Side tapped mounting 12 11 11 9 20 105 MHKL2-12C DFinger: Through-hole mounting 16 22 14 14.6 28.6 166 MHKL2-16C Dust cover adhesion 20 40 18 16 34 314 MHKL2-20C Dust cover adhesion

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5

VCL

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 342 Series VCS Direct Operated 2 Port Solenoid Valve For Steam How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

Cylinder with Lock Series CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

LEC-OM02904

LE--LE-CSM-AWG14 14 .

CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0