5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Table of Contents

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZJ 3.5 4.5 5 7 8 ZI 6 10 12 16 20 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44

NCQ2/CQ2

V Built-in One-touch Fittings (CQ2 only) Bore size (mm) Z1 W1 P1 V 32 40 50 13 13 16 6 6 8 36.5 40.5 50 59 66.5 82 W1 Basic Style Without auto switch With auto switch Bore size (mm) 5 st 20 st 10 st 5 st 10 st 5 st A B F CQ2 P 10 st B 10 st A NCQ2 P CQ2 P NCQ2 P F 5 st 10 st 20 st 5 st 20 st 10 st 20 st 10 st 20 st 5 st 20 st 5 st 20 st 32 40 35 28 38 Rc1/8 40 33 5.5 7.5 Rc 1/8 M5 x 0.8 M5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63 80, 100 RQ Double rod CQ2W 7-6-25 MU Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 D7-6-42 Spring extend CQ2 -X Non-rotating Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12,

ZP

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

CQ2

32, 40/5 to 100 50 to 100/10 to 100 Double rod CQ2W 2.3-22 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-38 return/extend CQ2 CU Non-rotating rod 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 Single rod CQ2K 2.3-56 CQS Double acting 12, 16, 20 25, 32, 40 50, 63 CQ2 Double rod CQ2KW 12, 16/5 to 30 20, 40/5 to 50 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

Table of Contents

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

Table of Contents

/Port size Symbol Connection 2 to 8 10 to 16 40, 50 20 to 32 20 20 N4 4 Nylon tube 25 25 6 Nylon tube N6 Barb fitting 32 32 Vacuum entry 4 Urethane tube U4 40 40 6 Urethane tube U6 50 50 M5 x 0.8 A5 Male thread M6 x 1 A6 M8 x 1 A8 Pad type (Refer to Table (1) for applications.)

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

5-Port Solenoid Valve

Port size M5 One-touch fitting (Replaceable) Port size 01 D-sub, Flat Ribbon EX510 Manifold Exploded View 32 32 32 ( ) C6: 12.8 N7: 16.6 Fitting, Plug Part Nos.

ZP

Form w 1 Material e Vacuum inlet Construction p. 117 Adapter Assembly p. 121 10 13 21 2.5 M5 x 0.8 5 8 16 21.5 20 25 23 4 32 23.5 10 13 B5 21 2.5 M6 x 1 6 8 16 21.5 20 25 23 4 32 23.5 40 32 4.9 12 50 33 20 25 B8 B6 N S U F GN GS ZP T U 29 3.5 M8 x 1.25 8 12 32 29.5 40 32 6.6 50 33 10 13 27 2.5 16 27.5 20 25 29 3.5 32 29.5 40 32 7 50 33 Rc1/8 NPT1/8 NPTF1/8 12 B01 N01 T01 1 N: NBR, S: Silicone

V100

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

ZP

/Port size Symbol Connection 2 to 8 10 to 16 40, 50 20 to 32 20 20 N4 4 Nylon tube 25 25 6 Nylon tube N6 Barb fitting 32 32 Vacuum entry 4 Urethane tube U4 40 40 6 Urethane tube U6 50 50 M5 x 0.8 A5 Male thread M6 x 1 A6 M8 x 1 A8 Pad type (Refer to Table (1) for applications.)

AS

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 2 (2) AS121F-M3 AS131F-M3 2.5, 4, 6 M3 x 0.5 (2) AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 (1) AS121F-U10/32 AS131F-U10/32 6, 10, 16, 20 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (2) AS221F-01 AS231F-01 R 1/8 20, 25,

Free Mount Cylinder

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Air Fittings & Tubing

A (1) <M5> <M5> M Weight (g) L3 D1 D2 L1 L2 Part No. 6 19 7 19 36 29 37 66 48 68 70 93 KQ2VF04-M5 KQ2VF04-01S KQ2VF06-M5 KQ2VF06-01S KQ2VF06-02S KQ2VF08-01S KQ2VF08-02S KQ2VF08-03S KQ2VF10-02S KQ2VF10-03S KQ2VF12-03S KQ2VF12-04S M5 X 0.8 8 14 9.8 13.4 9.8 13.4 17.6 20.5 22 23.5 24.5 25 11 15.5 12.5 15.5 20 17 20 25.5 22 24.5 24.5 25.5 20 29.5 20 29.5 38.5 31 38.5 45.5 41 45.5 45.5 50 16 16

Air Slide Table

A) MXQ12B 50 28 20 27 18 MXQ20(A) MXQ16B 57 31 20 30 19 MXQ25(A) MXQ20B 64 32 21 31 20 -X11 is not available for the MXQ6(A, B) and MXQ8(A, C).

15

8 70 50 4 44 69.8 83.5 M4 x 12 M5 x 45 11 NX M5 x 0.8 9 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 69.8 83.5 M3 x 12 M5 x 45 12 NM2 M4 x 0.7 8 50 36* 4.5* 38.5 69.8 83.5 M4 x 12 M5 x 25 10 32