RSH

REA REC 32, 50, 63, 80 20 RHC MTS Guide rod CC Mounting Set screw (M3) Caution qDo not apply rotational torque to the cylinder rod. Install so that the cylinder's contact surface will be parallel to the pallet's contact surface to prevent rotational torque from being applied on the cylinder rod.

Electromagnetic Digital Flow Switch

Lead wire and M12 connector (31) (24) (45) Brown Cable Specifications (3000) (30) White Conductor Nominal cross section area AWG21 External diameter Approx. 0.9 mm 3: Blue 4: Black Blue Insulator Material Non-lead heat resistant PVC Pin no.

SI unit for EtherNet/IP TM

Match polarity between solenoid valve and SI unit output. -41No.EX-OMX1001 Maintenance Replacement of the SI unit Remove the M3 hexagon screws from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

CJP

X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0

MRHQ

x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5

High Vacuum Angle Valve, XL Series

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

XL

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

Process Pump

PAF3000/5000 Series Description PAF3000 series PAF5000 series PAF3413 PAF3410 PAF5410 PAF5413 Diaphragm kit KT-PAF3-31 KT-PAF5-31 Check valve kit KT-PAF3-36 KT-PAF5-36 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. Note) One of Nil, F or N is entered as thread symbol.

2–4

mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

A

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5

Soft Start-up Valve AV2000/3000/4000/5000

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5

Soft Start-up Valve AV2000/3000/4000/5000 1

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76

VM

Key can be removed at the on and off positions. 90 T.T. 5-6-31 30 3 Port Mechanical Valve: Heavy Duty Type Series VM800 Sturdy construction. Either N.C. or N.O. is available. Piping possible to any port. Proper countermeasures can be taken for applications in which the noise of the exhaust could cause problems to the surroundings. Many actuator positions and orientation options.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

Compact Hydraulic Cylinder Series CH
KGB

15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

3

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).

Direct Solenoid

NPTF Bottom 04 sP0105 %,,NPTF SidE 5 AXT 333-21 Terminal Block Subolate ME4OI SLR Lell and Right end plates-Shorl w/o conduil NPT threads. Includes (3)O-rings AFP 568-015 1 pr.

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type