5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Applicable up to 8 solenoid valves) ... ... ... ... ... ... 20 16 08 VQC 20 stations 16 stations 8 stations Two stations are necessary for the double, 3 position (Dual body type).

Table of Contents

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63 80, 100 RQ Double rod CQ2W 7-6-25 MU Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 D7-6-42 Spring extend CQ2 -X Non-rotating Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12,

AC Servo Motor Driver (Pulse input type/Positioning type ）

Dwell 0 to 20 ms 16 83 16.

CQ2

32, 40/5 to 100 50 to 100/10 to 100 Double rod CQ2W 2.3-22 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-38 return/extend CQ2 CU Non-rotating rod 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 Single rod CQ2K 2.3-56 CQS Double acting 12, 16, 20 25, 32, 40 50, 63 CQ2 Double rod CQ2KW 12, 16/5 to 30 20, 40/5 to 50 50

Table of Contents

5 32 3 16 1 4 5 16 3 8 1 2 1 2 17.46 17.46 17.46 22.23 25.4 28.6 -18 -20 9 16 -18 9 16 3 4 7 8 1-12 -14 -16 Bulkhead Male Elbow: KQ2LE Applicable tubing Applicable tubing O.D.

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

Made to Order

15 15 16 16 20 20 22 22 28 35 The standard stroke for 12 and 16 is 100 st.

AC Servo Motor Driver (Network card type ）

identification . 20-8 20.2.3 LED display . 20-9 20.2.3.1 Network Status LED . 20-9 20.2.3.2 Card Status LED . 20-9 20.2.3.3 Link/Activity LED . 20-9 20.2.4 Ethernet cable connection . 20-10 20.3 PROCESS DATA (CYCLIC DATA EXCHANGE) . 20-11 20.4 ACYCLIC DATA EXCHANGE . 20-15 20.4.1 Acyclic data exchange communication format . 20-15 20.4.2 Error number . 20-16 20.4.3 PROFIdrive parameters (

5-Port Solenoid Valve

COM. 21 22 19 20 19 20 17 18 17 18 15 16 15 16 COM. COM. 13 14 13 14 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 1 2 1 2 1 2 (P: 26 pins) (PG: 20 pins) (PH: 10 pins) A mixture of single and double wiring can be specified on the manifold specification. The maximum number of stations is determined according to the number of solenoids.

SY

... ... ... ... 20 16 8 20 20 08 Note) Two manifold stations are required for double solenoid 3 position valves (dual body type).

Table of Contents

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

5

MQ D-G5, K5, G5lW D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8 20 to 63 RHC 8.5 Auto switch 12 Auto switch Hs Hs RZQ 24.5 16 B 33 A B 26 A D-H7l, H7lW D-H7NF 20 to 63 D-C73C, C80C 20 to 63 8.5 Auto switch 8.5 Auto switch Hs Hs 16 16 B 29 A B 36.7 A D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 12 Auto switch Hs 8.5 Auto switch Hs 24.5 16 B 38.2 A B 33 A (mm) Auto Switch Mounting Height Auto Switch

ZP

Pad diameter (mm) 10 10 Vacuum entry port (Refer to Table (1) for applications.) 13 13 16 16 20 20 Table (1) Vacuum Entry/Mounting Thread Diameter 25 25 32 32 Mounting thread diameter (Male thread) 40 40 20 to 50 10 to 16 Pad dia.

Hydraulic

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

ISO Cylinder

10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 5 28 14.2 M4 x 0.7 19 6 15 12 10 7 6 16 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 14 10 9 22 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size

Air Slide Table

46 mm 20 25 25 Size 16, 20, and 25 have two auto switch mounting grooves on both sides.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

NCA1

SN 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 1.26 1.1 9/32 1/4-20 1.43 1 1.71 3 5/8 2.36 4 3/4 5/8 1 15/16 2 1/4 200 (2) 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 250 (2.5) 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1