Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 295mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 60mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 100mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 120mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 160mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 95mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 170mm

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

MRQB-OM0002

VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337 405 472 OUT 1256 183 251 377 502 628 754 879 40 14.4

One-touch Fittings Series KQ2

40 42 44 40 46 48 49 51 53 53.5 55.5 57 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 3 16 19.5 16.5 3.5 11.4 10 1 4 17 4.6 20.5 13.2 10 5 16 18.5 6 23.5 15.2 12 17.46 3 8 21 7 25.5 17.9 17 22.23 9 17.46 1 2 9.6 22 28 21.7 17 22.23 Reference dimensions after NPT thread installation.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Nozzle Type Ionizer

, Stainless steel Material Nozzle Stainless steel Emitter Tungsten Impact resistance 100 m/s2 Energy saving static neutralization nozzle 70 g Body weight High flow rate nozzle 70 g Female threads for piping 75 g L-bracket 30 g Bracket weight Pivoting bracket 40 g DIN rail mounting bracket (Single unit) 40 g Standards/Directive CE, UL, CSA, RoHS *1 Measured with a probe of 1000 M and 5 pF

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.