VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

CNG

30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10

240

NS 20 20 30 30 40 40 50 60 60 LT 58 58 68 68 78 78 88 98 108 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 26 Compact Slide MXH Series Dimensions: 20 LT MXH MXH 20 31 MXS MXQ 14 LA LB J x M5 x 0.8 Depth 6.5 MXQ MXF 3 x M6 x 1.0 through 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) MXW Pilot hole dia 5.1 2 x 3 x 9.3 counterbore depth

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [

Compact Cylinder with Air Cushion and Lock Series RLQ

type Bore size 32 40 50 63 D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W Number of auto switch D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-F9V D-A7, A7H D-A73C D-A80, A80H D-A80C 12 11 10 12 13 14 14 16 D-A79W D-A9, A9V 1 pc. 2 pcs. 20 20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F D-F7W D-J79W D-F7BAL D-F79F D-F9BAL

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

Air Slide Table Series MXP

, depth 4 15 15 Mounting datum level D B Q QL Without magnet and switch rail 8 2 x M2 x 0.4, depth 3 3.15 2.5 (mm) Model Z G J H K L M QL Q S V W L MXP8-10 60 40 44 10 21 20 20 32 8 52 32 14 2 x M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 50 20 20 74 65 90 202 Air Slide Table Series MXP Dimensions: MXP10 Z 3 Metal stopper V K 4 5 Max. 5.5 MXH 20 G 2 x M3 x 0.5, depth 5 MXU Max. 3.5 M N

MU

5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75 Depth

Rotary Table

Order made parts [g] Size 10 20 30 50 With interchangeable table and interchangeable plate 70 160 120 220 With interchangeable table 30 60 80 130 With interchangeable plate 40 100 40 90 Effective torque 10 50 8 Torque (Nm) 6 30 4 20 2 10 0 0.2 0.4 0.6 0.8 1 Oprating pressure (MPa) -22- Internal construction and parts MSQ10 to 50* 16 10 5 9 15 20 3 23 19 18 6 14 8 7 2 21 1 24 13 22 12 11 17

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

0.4

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

VZ5000

VFS Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm VS4 Series MB, CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series VQ7 EVS 800 700 600 500 400 300 200 100 0 749 749 Perpendicular, upward actuation Horizontal actuation 610

VDW

P Series 10, 20 VDW 0 15A 1 2 6 65 (61.5) Series 1 2 10 20 8.5 (6.3) P Series 30 VCW20 12 01A 1 (IN) port 1/8, 1/4 1/8, 1/4 2 (OUT) port Dimensions inside ( ) are for port size 1/8. 12.8 2 x M4 x 6 246 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Dimensions VDW21-lF VDW31-lF 40 27 30 20 6.35 6.35 11.4 VX2 20 27 34 25 14 VXD (Bracket mounting hole) 2 x