High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 ABS 100 50.00 1000 1000 0 0 0 0.5 2 ABS 100 50.00 1000 1000 0 0 0 0.5 1 3 ABS 100 50.00 1000 1000 0 0 0 0.5 4 ABS 100 50.00 1000 1000 0 0 0 0.5 1 INC 50 10.00 1000 1000 0 0 0 0.5 2 INC 50 10.00 1000 1000 0 0 0 0.5 2 3 INC 50 10.00 1000 1000

MGP

1.87 2.17 2.41 2.64 2.88 50 MGP50 1.84 2.19 2.31 2.72 2.78 2.96 3.15 3.33 3.83 4.20 4.57 4.94 63 MGP63 2.18 2.53 2.65 3.06 3.12 3.30 3.49 3.67 4.18 4.55 4.91 5.28 80 MGP80 4.58 4.58 4.81 5.10 5.38 5.67 5.96 6.25 7.08 7.66 8.23 8.81 100 MGP100 7.26 7.26 7.33 7.74 8.52 8.94 9.36 9.77 10.9 11.7 12.5 13.4 7-3.MGPS-( (kg) (mm) (mm) 25 50 75 100 125 150 175 200 50 MGPS50 2.69 3.03 3.64 3.98

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100

60

Rated voltage Note) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) Coil insulation type Note) 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Nil H Class B Class H DIN terminal and DC spec. are not available.

pa

Ratio of discharge rate against fresh water (%) PAX PB 50 0 1 10 100 1000 Viscosity (mPas) Caution Viscosities up to 1000 mPas can be used.

Booster Regulator/Air Tank

50 Drain port 1/4 100 200 100 400 674 200 696 (mm) A 481 520 444 477 B 394 429.8 394 429.8 C 3/8 1/2 3/8 1/2 D Note) 469 493 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

MXF

0.12 0.04 0.04 MXF16-50 CX MXF16-50 0.03 0.03 0.08 MXF16-30 D0.02 0.02 MXF16-30 0.04 0.01 0.01 -X 20 40 60 80 100 0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20

CNG

2 2 MNB 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100 40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

IP8101 Series

= 81.0% ( ) (75A) 100% position = 100.0% ( ) 100% 100 Quick opening 50 Linear Stroke (Y) User Equal percentage 50 0 0 100 100% 0% Input current (X) Fig. 29 7: Be sure to set all 11 date items.

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .

Cylinder with Lock Series CNS

500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 2000 600 CNS 500 160 160 CLS 140 400 1000 140 700 800 900 CLQ 125 320 Load mass: m (kg) Load mass: m (kg) 125 300 RLQ 600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

/

VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60 Hz 220 VAC [230 VAC] 50/60 Hz 24 VDC 12 VDC Note 1) Refer to the below table (1) for combinations with light/surge voltage suppressors.