Pilot Operated A, B, G, H, J, L) (Nil, A, B, G, H, J, L) 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V (D, E, N, P) Note) VXD2130 AC VXD21 4 5 Model VXD22 6 7 VXD23 8 9 DC specification is not available.
m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31
4 inch NPT) B Code Material PCTFE (Standard) Vespel 3) PEEK PTFE 4) 5) 0 2P 3P 4P 4PL 5PC No code VS PK TF V3 1 2 10 40 -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.
With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..
75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.
Reed switch: D-A93 Stroke B Stroke E Model Auto switch operation range A 100 75 125 10 20 30 125 40 50 150 75 100 30 150 20 50 10 40 21.6 (19.1) 20.9 (18.4) 18.4 (15.9) 11.7 (9.2) 15.6 (13.1) 18.5 (16) 15.6 (13.1) 12.9 (10.4) 8.4 (5.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 4.9 (2.4) 6.4 (3.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23
B B B B B 65.4 4-Rc(PT)1/8 (P, R port) Manual override 2n-M3 X 0.5 (A, B port) Depress and turn to operate and lock override.
200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7
A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.
LECSA LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less
(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.
of sphere R Maximum thread depth P Weight (kg) A B C D T J G H Nominal size Pitch CY Standard: Heavy Load Type Hydraulic: Up to 7 MPa MQQ M JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96
-48-150 40 50 63 80 100 100 16 20 24 30 39 48 1.5 1.5 1.5 1.5 1.5 1.5 75 100 100 125 150 150 76 89 106 131 152 159 50 62 72 82 100 100 18 18 24 38 42 49 50 59.5 66 79 96 96 1.25 2 2 2.5 3 3 15 18 21 24 29 29 1.25 2.5 2.8 5.2 9 9.3 9000 14000 22000 36000 55000 55000 43 52 60 73.5 86 86 11 14 18 18 22 22 16 16 20 22 24 28 32 32 41 46 55 70 RHC MK(2) Option: Heavy Load Type Hydraulic: Up to
to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not
/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch) P = 17 One-touch fitting (A, B port) 24.5 1/8 (A, B port) Applicable tubing O.D.: 6, 1/4" Other dimensions are the same as the grommet type.
Add the stroke to calculate the length of intermediate strokes. 7 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5
(Individual spacer) Function plate Individual spacer Digital pressure switch for vacuum 82 100 (2000) 62 4 x 5.7 (Mounting hole) 3 5 19 32.4 A A A B B B S Pitch P = 33 31 19 Adapter B A: Release flow rate adjusting needle with lock nut A A A B B B Silencer case (Built-in silencer) L1 L2 9 4 L H SET (Needle fully open) Suction filter Adapter D Pressure switch for vacuum Pressure setting trimmer
A 1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.