Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

CJ5-S

14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23

CJ5-S

14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23

5 Port Solenoid Valve SY Series

: SY7220(-F2) G H C8, N9 C10, N11 SY7220-02(-F2) G H 20 (A, B port) 1/4 (For mounting bracket) 2-M4 x 0.7 depth 6.5 20 7 31.5 [38.5] 40 24.5 One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" G: Approx. 300 H: Approx. 600 77 121.4 [125.8] (Lead wire length) 13.6 B A Manual override (For manifold mounting) 24.2 19 42 (For mounting) 23.2 (52) (66) (Light/surge voltage

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 V6 LEJS 40 500 A H q Accuracy e Motor type *1 r Lead [mm] Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 w Size Symbol Type Output [W] Actuator size Compatible driver Nil Basic type H High precision type V6 AC servo motor (Absolute encoder) 100 40 LECYM2-V5 LECYU2-V5 V7 AC servo motor (Absolute encoder) 200 63 LECYM2-V7 LECYU2-V7 t Stroke [mm] *2 40 63 *1 For motor type V6, the compatible

CNG

l 0.25 ZZ 178 (186) H e f h ZZ 35 30 55 198 (206) 16 193 (201) 40 30 62 215 (223) 17 Stroke x 196 (204) 40 35 62 218 (226) 17 221 (230) 50 35 70 241 (250) 17 Note) Dimensions inside ( ) are for long strokes.

Cylinder with Lock Series CNG

l 0.25 ZZ 178 (186) H e f h ZZ 35 30 55 198 (206) 16 193 (201) 40 30 62 215 (223) 17 Stroke x 196 (204) 40 35 62 218 (226) 17 221 (230) 50 35 70 241 (250) 17 Note) Dimensions inside ( ) are for long strokes.

KJ

2 1 4 3 8 1 2 9 36.5 38.5 38 40 40 42.5 42.5 43.5 45 48.5 49.5 50 54 54.5 56.5 58.5 59 60.5 12.7 14.29 12.7 14.29 12.7 14.9 1 8 2.5 14 15.5 44.5 42 46 44 48.5 46.5 49.5 51.5 52.5 55.5 56.5 60 61 64.5 64.5 65.5 68.5 5 32 3 16 10.4 9.7 16 10.4 3 16 3.5 18 11.4 10.6 16.5 11.4 K 14.29 1 4 13.2 4.6 19 13.2 12 17 M 17.46 Connection thread 21 22 35 42 43 56 31 41 68 (With seal) H 5 16 15.2 6 15.2

7

m3/h.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R Width across flats 10 Width across flats 2 F E D C Y 2 A B Additional dimensions by stroke (mm) Dimensions/10mm stroke (mm) H I J Q: 4 Q: 6 Stroke Y I E A B C D F H J Model R S R S 20 +10 +38 +28 ZPR10F10-0-A10 30 10 12 10 12.5 23.4 39.5 50.5 84.5 1.5 +20 +48 23 ZPR13F10-0-A10 40 13 15 +30 +84 10.4 20.6 12.8 21.6 10.5 13 23.9 40 51 85 2 +54 ZPR16F10-0-A10 50 16 18 +40 +94 ZPR 20/25/

LEC-OM07605CN

40 168 135 0.8 H LECSS2-T8 40 168 170 1.0 LECSS2-T9 60 168 185 1.4 W D 4.8.3 [mm] a1 c d1 a a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

IDG

With float type auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV

10

-X Technical Data 415 Air Cylinder: With End Lock MBB Series 32, 40, 50, 63, 80, 100 RoHS How to Order 50 L 32 H N MBB L 32 50 H N M9BW MDBB With auto switch With auto switch (Built-in magnet) Made to Order For details, refer to page 417.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

CNG

l ZZ e f h ZZ H 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke 40 193 (201) 30 17 62 215 (223) 40 196 (204) 35 17 62 218 (226) 50 221 (230) 35 17 70 241 (250) Note) ( ): Denotes the dimensions for long stroke.