CG5-S

10 -04 R 1/2 R 3/8 -03 <R type> KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

Shock Absorbers and Rate Controls

r/a Pllt l550tt -1, -2, -3 7 .68 8.371.73(Fl r%,r2 |JN.50 1.48 1.t 5 4.63 l'rlA r.37 1..37l{/A N/A Pf | 575tf , -2, -3 9.68 IU.J/ 1.73(lI) l7,r"l2 ul,l .50 1,48 5.63 t{lI 1.37 1.81 VA n/A Pl{t2050tr t, -2, .3 8.90 9.552.48(lD 2rl2-l? UN .75 1.98 5.50 |,l/A 1.50 1.15 N/A N/A Pn?r 00rt t2.9 rI.) 2.48tln ?Yr-l?

Table of Contents

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Electric Actuators

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Table of Contents

The pressure difference generated at this time lets the check valve open y and the residual pressure on the A port side is quickly exhausted from R port. PP PA 2 Quick exhaust 1 (P) OFF 2 (A) 1 3 (R) 14-3-7 8 Series AV2000/3000/4000/5000 Construction r !5 !8 e t o B !2 !1 ON OFF y !

CG5-S

10 -04 R 1/2 R 3/8 -03 <R type> KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

High Vacuum Angle Valve

Note 2) Types with auto switches are not available in case of high temperature types. r o 2-1 8-1 8-2 XLA 2-1 8-1 Note) Values at normal temperature, excluding gas permeation. r o 8-2 XL XL XLQ Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

smcmaintenancepartslist

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Table of Contents

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

4/5 Port Air Operated Valve Series SYJA3000

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

SMC Basic Pneumatics

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.