PFxx-OMY0005

Error output is selected: Refer to page 43 e. Output OFF is selected: Refer to page 43 Press the SET button to set. Return to function selection mode.

HEC-OM-S008

[CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

XL-OMY0001

E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa

CE

0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 g (mm) mm 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168 32 260 297 334 371 408 445 482 556 630 40 462 499 536 573 610 684 758 906 1054 50 1015 1243 1699 63 1105 1333 1789 3-3-3 2 (m1+m2)V E(J= m1 kg m2 kg V m/s 4. 4-1 CE1 4-2 A A B B C COM(OV) D COM(OV) E 12 24V F 0V G CEU5 CEU5

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8

Free Mount Cylinder for Vacuum Series ZCUK

Unit: g Model Bore size (mm) Cylinder stroke (mm) 5 10 15 20 25 30 40 50 63 (68) 69 (79) 75 (85) 81 (91) 87 (97) 93 (103) 10 103 (128) 163 (193) 115 (145) 127 (157) 139 (169) 151 (181) 16 180 (214) 300 (340) 348 (388) 396 (436) 204 (244) 228 (267) 252 (292) 276 (316) ZC(D)UKC 20 577 (636) 655 (714) 304 (358) 499 (558) 343 (402) 382 (441) 421 (480) 460 (519) 25 514 (587) 814 (892) 934

Vacuum Regulator

P601010-11 q w Included Parts No. 1 2 Plug nut O-ring Description w q Gauge Nut Assembly Used to connect the pressure gauge and pressure switch. e P601010-18 q w Included Parts No.

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 17.5 22 3 13 13 ZPG13C-7A-X2 13 15 1.8 ZPG13U-7A-X2 13 15 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG20C-7A-X2 20 23 1.7 ZPG20U-7A-X2 20 23 19.5 24 19.5 24 4 15 ZPG25C

IDX-OM-W025

mm Model Port size A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 36 50 526 (250) 5195 13 500 75 7001 R2 470 855 (128) (455) (110) IDF Series 6-3 Dimentions 6 2 IDX-OM-W025 Air Dryer 6 References 6-4 Electrical Circuit IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI For Option R For Option R GFCI L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC MC PRR MC THR CM C01 MC OLP1

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27

Digital Flow Switch (Integrated display type)

Flow rate at normal condition 0.927 = Flow rate of standard condition -40No.PF-OMG0010-H Dimensions (in mm) PF2A703H/706H/712H Model A B C D E F G PF2A703H 55 mm 160 mm 40 mm 92 mm 67 mm 55 mm Rc1, NPT1, G1 PF2A706H 65 mm 180 mm 45 mm 104 mm 79 mm 65 mm Rc11/2, NPT11/2, G11/2 PF2A712H 75 mm 220 mm 55 mm 114 mm 89 mm 75 mm Rc2, NPT2, G2 Model H I J PF2A703H 36 mm M5 x 0.8 8 mm PF2A706H 46

XMD/XYD Series

L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38

IDX-OM-W028

H measuremm Model Port size A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 123 5 279 46 50 13 353 85 600 379 1258 64 550 135 0 290 388 680 414 IDU37E R11/2 360 855 IDU55E R2 470 1345 53 530 1440 360 30 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-3 External Dimentions 6 3 IDX-OM-W028 Air Dryer 6 References 6-4 Electrical Circuit IDU22E-23 IDU37E-23 GFCI For Option R GFCI For

Mist Separator

3/8, 1/2 70 147.1 25.5 35.5 38.4 75 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AFM40-06-D 3/4 75 149.1 27 35.5 38.4 75 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 Semi-standard specifications PC/PA bowl Metal bowl with Metal bowl level gauge With element Model With With With With With With service indicator barb drain drain drain drain drain fitting guide cock guide cock guide B B B B B B A C1 AFM20

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

Soft start up valve with lock out

Dimension AVL2000 to AVL5000 Soft start up valve with lock out AVL2000/3000/4000/5000 (mm) Port size A B Model C D E F G H Lockable soft start valve. Gradual increase of supply pressure and rapid exhaust of system air when the supply is shut off.

Micro Mist Separator

3/8, 1/2 70 147.1 25.5 35.5 38.4 75 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AFD40-06-D 3/4 75 149.1 27 35.5 38.4 75 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 Semi-standard specifications PC/PA bowl Metal bowl with Metal bowl level gauge With element Model With With With With With With service indicator barb drain drain drain drain drain fitting guide cock guide cock guide B B B B B B A C1 AFD20

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Plate Cylinder with Lock Series MLU

1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !