Vacuum

u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR Series ZPT Serles ZPY eAdaplor

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

Vacuum

u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR Series ZPT Serles ZPY eAdaplor

Table of Contents

Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7.

Rotary Table/

7, !

Table of Contents

Vane Style Size: 1, 3, 7, 20 .

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

C76

7 !

New

Reduced apparent power 10 VA m 7 VA (Size 1) Normally Closed (N.C.)

C76

7 !

CM2

7 !8 !

CJ2

SCJ26, #7, #4 CJ2F10SCJ210, #7 SCJ210, #7, #4 CJ2F16SCJ216, #7 SCJ216, #7, #4 The data shows auto switch styles.

MK

7 6 7 17 Mounting Bracket Part No.

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

JIS Standard Hydraulic Cylinder

Refer to Best Pneumatics No. 2-1 for details. 361 CH2E/CH2F/CH2G/CH2H Series Construction @7 q y i @8 !4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Modular F.R.L. Unit

AD38 AD38NNote 7) AD48 AD48NNote 7) AD48 AD48NNote 7) AD48 AD48NNote 7) AD48 AD48NNote 7) AD48 AD48NNote 7) N.O.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

. 5 7 20 X20 Same as standard.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

7 Size: 1 to 3 Size: 7 Basic type Steel wire !8 High precision type Steel wire Stainless steel Carbon steel NBR Stainless steel NBR !

AC Servo Motor Driver (Pulse input type/Positioning type)

end Reverse rotation stroke end (Note 5) LSP 6 LSN 7 10m max.