High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

V

5 ~ 60C / 40 ~ 140OF Rotation Angle 90O, 180O, 270O Seal Material Buna N Drive Shaft Double Shaft, One side with key and groove, other side is a square shaft Maximum shaft loading and kinetic energy Type Fr (N) Fs (N) E max (Nm) NCRB50 250 200 0.084 NCRB80 500 500 0.040 NCRB100 600 550 0.061 D I M E N S I O N S (I N C H) NCRB50~100 H O W T O O R D E R NCRB R O TA R Y A C T U AT O R NCRB

Soft Start-up Valve

This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. q r w Exhaust OFF t e 6 A AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Actuator Position Sensor

W 0x003C BDC1 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (60) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003D 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC1 (61) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x003E BDC2 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (62) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003F 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC2 (63) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to

Soft Start-up Valve

This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

PSxx-PSV0007

lock 0x0 Refer to P.4 Device Lock 0x0010 (16) 0 R Vendor name SMC Corporation 0x0011 (17) 0 R Vendor text www.smcworld.com 0x0012 (18) 0 R Product name e.g.

IDX-OM-W023

TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR TDR MC MC TDR TDR MC PTC MC OLR OLR MC PTC MC CM CM MC TDR MC MC TDR C11 PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

90

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/8 NPT 1/8 Rc 1/4 NPT 1/4 H 14 14 17 17 I 1.5 1.5 1.6 1.6 ZS-31-X188 ZS-31-X189 ZS-31-X175 ZS-31-X186 G M5 x 0.8 I F 839 Multi-Channel Digital Pressure Sensor Controller Series PSE200

CXS

CXSM6R CXSL6R CXSM10-R CXSL10R CXSM15-R CXSL15R CXSM20-R CXSL20R CXSM25-R CXSL25R CXSM32-R CXSL32R 3. The manual lever (1.6 x 35, tip part: M1.6 x 0.35 x 3) is included with the cylinder.

4 Port Solenoid Valve Series VQD1000

Therefore, check the initial position by means of power supply or manual override prior to use. 3(R) 4(A) Vacuum pad 1(P) 2(B) Vacuum releasing air Atmospheric pressure or micro pressure 2 3 5 Use a VQD1 1 valve for vacuum applications. Connect the vacuum source to the 3(R) port. Air pressure cannot be applied to the 3(R) port.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.