Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

AR20-B to AR60-B

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

Check Valve Series AK 1

R thread Applicable tubing O.D.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Plug-in Unit

7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No. Blue None u Purple White i Gray Black o Lead wire color Dot marking Terminal no. White Black !0 Black None q White Red !1 Brown None w Yellow Red !2 Red None e Orange Red !

Pulse Valve

B e r u t y q w Immersion type q Piping 10 1 (25A) w Tank size e IN/OUT port size r Thread type H Immersion type 6 6 inch Nil None R Rc N NPT F G y Fluid and ambient temperatures t Outlet pipe dimensions and thread type ( p. 9 ) Symbol 1 2 3 4 Pipe projection Short Long Short Long Thread type None None G1" G1" B 40 to 60C u Pilot port size Nil 1/4 1 1/8 Pipe thread (Pipe for the OUT port

Title not found

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

AR20-B to AR60-B

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

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l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut

3 Port Air Operated Valve Series SYJA300 1

44) (36) 21 28 29 25 27 34 18 X 21 14 1 R P 3.5 40 4 26 40.5 26 34 4 48.7 10 2-M4 x 0.7 2-4.5 54.2 55.5 (3.6) 54.2 (Mounting screw) (For mounting) 8 1 (P, A, R port) 0.8 54.5 P R 1.8 (Breathing hole) 1.8 (Breathing hole) 20 16 14.5 With filter (80 mesh) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8

Air Cylinder MGQ Series Compact Guide Cylinder

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

Modular Type Regulator Series AR

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Rotary Actuator NCRA1 Series Single Rack and Pinion

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Clean Regulator/Fluororesin Type

i r u i !

DOC1020530

Acceleration/de celeration time 0 to 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 to 9 pulse Sets movement distance. -24- 5.3.2 Motor speed configuration Motor speed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the allowable