Rated Flow Range: 20 to 2000 l/min, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: -, Flow Direction: -

Input Specification: Current Input, Unit Specification: SI Unit Only, Fixed Unit: Pa, kPa, MPa, Lead Wire: -

Input Specification: Voltage Input, Unit Specification: SI Unit Only, Fixed Unit: Pa, kPa, MPa, Lead Wire: -

Input Specifications: Current Input, Output Specification: SV [2 Outputs (NPN/PNP Switching Type) + Analog Current Output], Unit Specification: SI Unit Only, Lead Wire: -, Bracket/Panel Mount: -, Sensor Connector: -, Operation Manual/Calibration Certificate: -

Size: 37 [6.1m³/min (ANR), 215.4.scfm], Voltage: 20 [200VAC (50Hz), 200/220VAC (60Hz), Single Phase], Option 1: Motor Type Auto Drain, Option 2: -

Size: 55 [9.8m³/min (ANR), 346.1scfm], Voltage: 30 [200VAC (50Hz), 200/220VAC (60Hz), Three-phase], Option 1: Motor Type Auto Drain, Option 2: -

Size: 75 [12.4m³/min (ANR), 437.9scfm], Voltage: 30 [200VAC (50Hz), 200/220VAC (60Hz), Three-phase], Option 1: Motor Type Auto Drain, Option 2: -

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve / Central Exhaust Specification, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Operating Temperature Range(°C): 5:50～, Suction Flow(l/min): 22, Nozzle Diameter: 1.0mm, Exhaust

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 5,700 / 6,100, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): 5000 or More, Supply Side Connection Type: [Rc (R)] R, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1 1/2, Control Side Connection

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 1,220 / 1,320, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 2000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 1,220 / 1,320, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 2000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 320 ～ 370, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 55, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type

Connection Type: NPT, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 12, IP Rating: IP65, Voltage: -, Sealing materials: NBR, Option: -, Bracket: No bracket, Lead wire length(mm): 500, Lead wire electrical entry: None, Integrated pilot valve: None, Applicable switch: Without auto switch (built-in magnet), Number Of Switches: 2

Connection Type: NPT, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 15, IP Rating: IP65, Voltage: -, Sealing materials: FKM, Option: -, Bracket: No bracket, Lead wire length(mm): 500, Lead wire electrical entry: None, Integrated pilot valve: None, Applicable switch: Without auto switch (built-in magnet), Number Of Switches: 2

Connection Type: NPTF, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 9, IP Rating: IP65, Voltage: -, Sealing materials: FKM, Option: -, Bracket: No bracket, Lead wire length(mm): 500, Lead wire electrical entry: None, Integrated pilot valve: None, Applicable switch: Without auto switch (built-in magnet), Number Of Switches: 2

Connection Type: NPTF, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 12, IP Rating: IP65, Voltage: -, Sealing materials: FKM, Option: -, Bracket: No bracket, Lead wire length(mm): 500, Lead wire electrical entry: None, Integrated pilot valve: None, Applicable switch: Without auto switch (built-in magnet), Number Of Switches: 2

Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 25, IP Rating: IP65, Voltage: -, Sealing materials: FKM, Option: -, Bracket: No bracket, Lead wire length(mm): 500, Lead wire electrical entry: None, Integrated pilot valve: None, Applicable switch: Without auto switch (built-in magnet), Number Of Switches: 2

Pressure Range(MPa): 0.15～1, Connection port location: Body side surface, Switch: Without D-M9-type auto switch (built-in magnet), Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: Rc, Shaft pattern: Double shaft (long shaft key & 4 chamfers), Axial direction: Standard, Made to order specifications: None, Lead wire electrical entry: Grommet, Mounting Style: Basic type, Starting

, Operating Pressure Range(MPa): 0.15～1, Connection port location: Body axial direction, Switch: Without D-M9-type auto switch (built-in magnet), Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: Rc, Shaft pattern: Double shaft (long shaft key & 4 chamfers), Axial direction: Standard, Made to order specifications: None, Lead wire electrical entry: Grommet, Mounting Style: Basic type

Operating Pressure Range(MPa): 0.15～1, Connection port location: Body side surface, Switch: Without D-M9-type auto switch (built-in magnet), Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: Rc, Shaft pattern: Double shaft (long shaft key & 4 chamfers), Axial direction: Standard, Made to order specifications: None, Lead wire electrical entry: Grommet, Mounting Style: Basic type,