Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Compact Cylinder with Solenoid Valve/

2 !8 !4 !6 w !3 q Manual button u 50, 63 !0 t i y o Length of plug connector lead wire Description No. Material Component Parts The standard length of the plug connector with a lead wire is 300 mm, but other lengths are available as follows.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

PF2D

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

CLQ

2".

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

Speed Controller with

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C