4

Disassembly 1) After loosening the screw q, then if the housing w is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull the screw q out of the housing w. 3) On the bottom part of the terminal block e, theres a cut-off part o.

Soft Start-up Valve AV2000/3000/4000/5000 1

Pressure range 0 1 2 3 4 5 Needle rotations 14-3-6 7 Soft Start-up Valve Series AV2000/3000/4000/5000 Working Principle w F.R.L. e AV r B ON OFF q t AU B-B AF 1(P) 2(A) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u IR y VEX AMR 3(R) B ITV IC Working description

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

RB/RBL/RBQ

RE A B REC CX CY Allowable rotating eccentric angle 2 < 3 MQQ M Installation Conditions for Rotating Impact (mm) 2 (Allowable rotating angle) R (Min. installation radius) RB0805 RB0806 RB1006 RB1007 RB1411 RB1412 RB2015 RB2725 S (Stroke) RHC Model 96 115 115 134 210 229 287 478 5 6 6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.

RB/RBL/RBQ

RB2725 S (Stroke) RHC Model 96 115 115 134 210 229 287 478 5 6 6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.

Check Valve Series AK 1

Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Component Parts No. t y e w r q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Vacuum Pad

Buffer assembly part no. q ZPB2J10-B5 [Weight: 21.8 g] Buffer assembly part no. q ZPB2K10-B5 [Weight: 23.6 g] w ZPB2J20-B5 [Weight: 35.9 g] w ZPB2K20-B5 [Weight: 36.9 g] Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 D A B 4 D A B M10 x 1 M10 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 2 M5 x 0.8 2.5 M5 x 0.8 4 Dimensions Dimensions

Guide Cylinder/Compact Type Series MGC

8 $3 y !

FQ1

point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.

AC Servo Motor Driver (Pulse input type/Positioning type ）

3.

Cylinder

BOre size ' 1~ A ' Q K B C GB J MM . NN ' A' oD C~ IGA ; H I " 'R J, , SLD (Trol). " ... . I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'

VQC

Values for double types are when the switch is ON. 1 5 3 N.C. N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

Solid State Auto Switches

pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown Diagnostic output OUT DC 3-wire type Brown Black DC (+) Blue DC () OUT DC 4-wire type Brown Black DC (+) Blue Orange DC () Connector Specifications M8-3 pin Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525

Vacuum Module Series ZX

Rc G Note) Station 8 only 8 (Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL(-Q) 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 (Dummy spacer) 4 pcs. NPTF When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

) (R2) 3 5 e q w r e q w r 4 (B) 2 4 (B) 2 (A) (A) VQ4351 VQ4350 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 VQ4551 (A) VQ4550 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description Material Note Number Body Spool

CJ2X/CUX/CQSX/CQ2X/CM2X

Model AS1001FM AS2051FM RS Q G Metric size 8 3.2, 4, 6 6 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" Inch size 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" RS H A Air flow (l/min (ANR)) 12 7 38 Controlled flow 0.2 0.1 Effective area (mm2) 0.6 RZQ 100 Flow rate (l/min (ANR)) 460 230 290 130 Free flow MI W S 1.5 Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow