Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

VK3000

B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread

VK3000

port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Thread type Type S42 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 V100 S Nil Rc Q CE-compliant Nil CE-compliant Port size R port: Rc 1/8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body

Clean Gas Filter

, TSJ, URJ Rc, TSJ, URJ 1/4 3/8 02 03 Symbol Filtration 0.01 m (Filtering efficiency 99.99%) IDFB Model type IDH Symbol Rated flow rare L/min (ANR) 10 Up to 240 ID Connection IDG Symbol Connection (IN, OUT) 0 2 5 Rc TSJ URJ IDK AMG AFF Model AM Model Weight kg Connection Filtration area cm2 Rated flow rate L/min (ANR) Note) AMD SFC100-02 Rc 1/4 (Female thread) 0.35 AMH SFC100-03 Rc 3/8 (Female

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

0.

) C8 (for 8) Rc 1/8 Rc 1/4 Side VQZ2l5 VQZ200 2 to 20 stations VV3QZ25-lll P.31 Port plug VVQZ100-CP (for VQZ100) 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VQZ3l5 VQZ300 2 to 20 stations VV3QZ35-lll P.31 Front matter 2 3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1

Modular Type Regulator Series AR

, NPT, G 1/8 Set pressure + 0.05MPa Note 3) [at relief flow rate of 0.1L/min (ANR)] 5 to 60C (with no freezing) Relieving type 0.29 AR20 1/8, 1/4 AR25 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 3/4 AR50 3/4, 1 AR60 1 0.05 to 0.7MPa Rc 1/16 Note 2) Note 1) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 0.06 0.26 0.21 0.44 0.47 1.17 1.22 Note 1) Pressure

IR1000/2000/3000

(PT) 1/8 L Rc(PT) 1/4 X1 Port size Rc(PT) 3/8 IRM Rc(PT) 1/2 Refer to page 8 for details.



AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 1 4 1 8 3 Tightening Torque when Piping 2 1 Connection thread Applicable torque (N.m) M5 x 0.8 Rc Rc Rc Rc Rc Rc 1 Rc 1 Rc 1 Rc 2 4 3 6 1 Approx. rotation

5 Port Solenoid Valve

, NPT, NPTF, G) 1/4 3/8 (Rc, NPT, NPTF, G) VFR VQ7 1/2 (Rc, NPT, NPTF, G) 1/2 (Rc, NPT, NPTF, G) C6 (for 6) C8 (for 8) C10 (for 10) C12 (for 12) N7 (1/4") N9 (5/16") N11 (3/8") 1/4 3/8 1/4 (Bottom ported) ^{1/2 (Rc, NPT, NPTF, G) V V V V V Page 626 Page 628 Page 630 Page 632 Page 634 3/4 (Rc, NPT, NPTF, G) (Rc, NPT, NPTF, G) D side 1/2 (Rc, NPT, NPTF, G) U side}

MG

Choice of Rc, NPT, G port is possible. (Refer to page 8-19-8.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Compressed Air Cleaning Filter Series

Bracket set BM58 Ball valve/Rc 1/2 1 pc. Barrel nipple/R 1/2 2 pcs. Elbow/Rc 1/2 1 pc. Ball valve piping set ADH-C400 Note) Accessory (Option) is included, but not assembled.

LUBRICATOR

Port thread Port thread Rc Rc G G NPT C3SL(-Z)-A NPT C3SL-3(Z)-A C3SL-A C3SL-3-A External appearance drawing and part no. B B Semi-standard 6 Semi-standard 36 Part no. Part no. Port thread Port thread Rc Rc G G NPT C3SL-6(Z)-A NPT C3SL-36(Z)-A C3SL-6-A C3SL-36-A Semi-standard Semi-standard 3W Part no.

Lubricator

Rc Rc C2SL-D C2SL-C-D G G NPT C2SL(-Z)-D NPT C2SL-C(Z)-D Appearance and part No. Semi-standard: 6 Semi-standard: 6C (7) Part No. Piping port thread ty pe (7) Part No. Piping port thread ty pe Rc Rc C2SL-6-A C2SL-6C-A G G NPT C2SL-6(Z)-A NPT C2SL-6C(Z)-A Semi-standard symbol 3 36 3C 36C Semi-standard: 3 Semi-standard: 3C (7) Part No.

VKF300

F Bracket VK300-43-1A 20 stations 20 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Common SUP, Individual EXH Type 21/for body ported type (Port A top ported) How to Order Applicable solenoid valves VKF333--M5 VKF333--01 VV3KF3-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base

5 Port Solenoid Valve, Series VQC

3/4 3(R) port 2-Rc 1/2 1(P) port 23 12 20.5 8 77.5 95.5 75.5 61.5 1.5 43.5 11.5 21.5 (6.5) 27 31 38.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 2-Rc 1/8 (Pilot EXH port) (mm) Formulas: L1 = 25n + 106, L2 = 25n + 241 (for 1 input block.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.