Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

Digital Flow Switches, Series PF2A, Series PF2W

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

Electric Actuator / Guide rod Slider

offset=10 Changed to Origin offset-10 Origin 50mm 0 10 20 30 40 50 CCW CW Stroke[mm] Origin 50mm 10 20 30 40 50 60 CCW CW Stroke[mm] Origin 50mm -50 -40 -30 -20 -10 0 CCW CW Stroke[mm] Origin 50mm -40 -30 -20 -10 0 10 CCW CW Stroke[mm] Origin 50mm -60 -50 -40 -30 -20 -10 CCW CW Stroke[mm] -25- 4.

VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

Environment

Nil Without cable 2 2 5 5 A 10 !

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

240

Compact Slide MXH Series 6, 10, 16, 20 RoHS MXH MXH Allowable moment Improved by up to 240% MXS MXQ MXQ MXF MXW MXJ MXP MXY With new high rigidity linear guide Allowable moment improvement illustrated below MTS Allowable moment (Nm) 0 0.5 1 1.5 F 1.7 times greater MXH Pitch moment Mp Current model 2.1 times greater My F MXH Yaw moment Current model F Mr 2.4 times greater MXH Roll moment Current

SZ3000

Purchasing order is available in units of 10 pieces.

SZ3000

Purchasing order is available in units of 10 pieces.

1

H ZZ + Stroke S + Stroke 1.5 H NA ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length 3.5 M8 x 1.25 24 M18 x 1.5 20 8 15.5 M4 x 0.7 25 17.5 15 17 10 22 0 0.033 11 8.5 33 6 Width across flats 8 length 3.5 M10 x 1.25 27 M22 x 1.5 25 8 15.5 M5 x 0.8 32 17.5 15 17 10

RLQ

L D d m t d H B C l IY-G04 IY-G05 C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 9-12-19 20 Simple Joint: 32 to 63 Type A Mounting Bracket 2-D T1 T2 M W V U F B E (mm) Joint and Mounting Bracket (Type A, Type B) Part No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

I J K L M N O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter

Digital Flow Switch (Remote type sensor unit)

PF2D504 0.4 4 PF2D520 1.8 20 PF2D540 4 40 Fluid temperature and pressure PF2D504/520 PF2D540 -21No.PF-OMG0006-F Dimensions (in mm) PF2D504/520 Model A PF2D504 9.53 PF2D520 12.7 -22No.PF-OMG0006-F PF2D540 -23No.PF-OMG0006-F Made to Order Model Indication and How to Order Refer to page 10 for details of model indication and how to order. -24No.PF-OMG0006-F : Select an isometric fitting with

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1 OUT2 OUT3 OUT4 OUT5 AC100~240V 1 t 1 10 x 10-6 Counting speed f = = = 10Hz (Approx:100kHz) 7 10 44.5 33.5 Note 2) UP / DOWN input Input wave form conditions: At a maximum of 100kHz, the UP/DOWN wave form should be as shown below. 104 113 0.2 125 +12V 10% UP pulse +12V 10% DOWN pulse 5sec 5sec 5sec 64 59 Note 3) 15mA when BCD is output. 18 Series

VZ5000

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 833 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP6 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Rotary Cylinder Series MRQ Size: 32, 40 1

(MPa) 1 0.4 0.5 0.6 0.7 10 CRQ2 7.

Rotary One-touch Fittings Series KS/KX

t i f h c u o t e n O d a e r h t e l a m ) T P ( R 3 KM12 5 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 6 8 0 1 KM15 6 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 4 6 Applicable Tube KM16 Tube material Nylon, Soft nylon, Polyurethane KM14 Tube O.D.