MHK2

MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed MHK2-16S 16 23 6 14.6 20.6 114 DL1 MHK2-20S 20 34 10 16 26 237 L2 MHK2-25S 25 58 14 19 33 443 20MHK2-12C 12 12 4 9 13 76 MHK2-16C 16 25 6 14.6 20.6 115 MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N)

MHK2

MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed MHK2-16S 16 23 6 14.6 20.6 114 DL1 MHK2-20S 20 34 10 16 26 237 L2 MHK2-25S 25 58 14 19 33 443 20MHK2-12C 12 12 4 9 13 76 MHK2-16C 16 25 6 14.6 20.6 115 MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N)

Wedge Cam Operation Provides

235 MHL2 MHK2-25D 25 14 19 33 440 MHK2-12S 120 76 13 9 4 12 9 MHR L1 Normally open Normally closed MHK2-16S 114 20.6 14.6 6 16 23 L2 MHK MHK2-20S 237 26 16 10 20 34 MHK2-25S 443 33 19 14 25 58 Single acting MHS MHK2-12C 76 13 9 4 12 12 MHK2-16C 115 20.6 14.6 6 16 25 MHK2-20C 237 26 16 10 20 44 MHK2-25C 443 33 19 14 25 73 MHC2 Series MHKL2/Long stroke models MHT2 Max. operating frequency

PSxx-OMU0008CN

[Err] [P_1] [P1L][P1H] [P_1] [n_1] Pn (63 ) -33No.PS-OMU0008CN-D 26 [H_1] [WH1] (63 ) 28 ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 [F 1] OUT1 1 2 2 -34No.PS-OMU0008CN-D (H_1) (WH1) (WH1) 1 (H_1) (WH1) (WH1) 1 1Er689o.rEr12() : OUT1OUT212 ()P_1P_2 -35No.PS-OMU0008CN-D [F 2] OUT2 OUT2 ONON 35 <> [F 2] [OFF] 26 [Err] [P_2] [P2L][P2H] [P_2] [n_2] Pn (63 ) -36No.PS-OMU0008CN-D

PSxx-OMM0002CN

.=514[V] 1F.S.40.010.04[V] F.S. ( NPN()() NPN PNP()() PNP TSJ Tube Swage Joint Swagelok swagelok URJ Union Ring Joint Swagelok VCR ON OFF () (26 ) ON OFF Hysteresis ON-OFF / () () 25[]ON-OFF -11No.PS-OMM0002CN-F NPN () () ()()( ) () ON ON 0 (1k 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) 26 ON-OFF ON () (P1L~P1H P2L~P2H) ON (26 ) () "digit" () 0 () SI ONOFF

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) PB PA A B (mm) Dimensions U S T U Model LVD2-S LVD3-S LVD4-S LVD5-S 11.5 28 9.6 26 34 17.5 26 35 20 29.5 57 25 17-5-49 8 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option combinations.

V

D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H A U S T P O R T 15 1.5mm 18 1.8mm 20 2 mm 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF Nozzle Diameter mm Specifications Max Vacuum Pressure 1.5 1.8 2.0 mmHg (Torr) Body Ported T Y P E 55 65 85 Max Suction Flow S Type 26

RSH

MK/MK2 RSQ/RSG RSH A CE1 Auto switch mounting position Auto switch model D-Z7l D-Z80 D-Y59 D-Y7P D-Y69l D-Y7PV D-Y7lW D-Y7BAL D-Y7lWV CE2 ML2B Bore size (mm) A B A B A B A B 20 18 8 18 9.5 18 2 18 4 ML1C 32 13.5 10 13.5 12 13.5 4.5 13.5 6.5 50 21.5 12 21.5 14 21.5 6.5 21.5 8.5 REA 63 16.5 31 16.5 33 16.5 25.5 16.5 27.5 80 26 33 26 35 26 27 26 29 REC RHC How to Install an Auto Switch MTS To

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Analog Output p. 26 Functions p. 26 Internal Circuits and Wiring Examples p. 27 Dimensions p. 28 3-Screen Display High-Precision Digital Pressure Switch/ IO-Link Compatible ZSE20B(F)-L/ISE20B-L Series How to Order p. 15 Specifications p. 16 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples

44

26 51.9 45.5 8.5 8.5 23 Union Elbow: KFG2L Width across flat Width across flat Applicable tubing size (inch) Effective area (mm2) Weight (g) L M d Model 2 x Applicable tubing H1 H2 O.D.

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

Clean Gas Filter

thread) SF SF 13.85 ED001S-X10V 0.38 26 TSJ 1/4 Tube Swage Joint SFD 33.18 ED101S-X10V 0.49 70 56.75 ED201S-X10V 0.70 140 LLB 13.85 ED001S-X10V 0.42 26 UOJ 1/4 Union O-ring Joint 33.18 ED101S-X10V 0.53 70 AD 56.75 ED201S-X10V 0.75 140 Note 1) Inlet pressure 0.7 MPa, at pressure drop 0.02 MPa Note 2) Element part numbers include numbers 3 to 7 in the construction figure.

KA

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.2.0-7 and 2.0-8 for more detailed precautions of every series.

MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 13 10 7 6 4 3.5 17.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 11 5 2.5H9 0 +0.025 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 8.5 17.5 4H9 0 +0.030 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

MQQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B M12 x 1 M4 x 0.7 6, 10 17 6, 10 7 19.6 4 8.1 3.2 M14 x 1 M5 x 0.8 16 19 16 8 21.9 5 9.2 4 M20 x 1.5 M8 x 1.25 20 26 20 13 30 8 15 5 M26 x 1.5 M10 x 1.25 25 32 25 17 37 8 19.6 6 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Escapements Series MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 2.5H9 0 +0.025 13 10 7 6 4 3.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 17.5 11 5 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 4H9 0 +0.030 8.5 17.5 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

Antistatic One-touch Fittings Series KA

8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5 1 4 KAL06-U02 11.4 11.4 10 15 Uni thread 24.5 23 17 12 1 8 1 4 KAL08-U01 KAL08-U02 25.5 26

Large Type Vacuum Unit Series ZR

Symbol Applicable switch Output specifications Lead wire length Nil Without valve unit 25 (L) Lead wire length 0.6 (3.0) m NPN output D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 65 (L) Lead wire length 0.6 (3.0) m PNP output Pilot valve specifications 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output DC: 1W type (with light: 1.05W

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO