HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

JXCx-OMT0061CN

(P.71) * 7 4.2 (P.18) PLC CC-link LED LED PWR ALM L ERR CC-Link L RUN CC-Link LED 8. LED (P.28) (LEC)LEDL RUNLEDL ERR/PLC PLC 17. CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

AIR COMBINATION

PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9. HOW TO REPLACE 17 10. DISASSEMBLY DRAWING . 1819 11.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Calle 18 69-05 Apart.

Metering Valve with Silencer Series ASN2

Calle 18 69-05 Apart.

Safety Speed Control Valve (SSC Valve) Series ASS

Calle 18 69-05 Apart.

7

S F D Q Grommet (with surge voltage suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (

ZVB20_E_

Confirm safety before starting operation. 18.

ZVB40_E_

Confirm safety before starting operation. removable 18.

Fieldbus system PROFINET compatible SI Unit

, 1: Short circuit 4 Valve 8, 9 diagnostics 0: No error, 1: Short circuit 5 Valve 10, 11 diagnostics 0: No error, 1: Short circuit 6 Valve 12, 13 diagnostics 0: No error, 1: Short circuit 7 Valve 14, 15 diagnostics 0: No error, 1: Short circuit Valve diagnostics 2 Table. 5-5 Valve diagnostics 2 Bit Description Explanation 0 Valve 16, 17 diagnostics 0: No error, 1: Short circuit 1 Valve 18

IZx-OMR0035

Details of NDL flashes. 16 17 18 failure No/poor neutralizing performance input Product does not operate Output Abnormal 35 Doc.

3-Position Rotary Table

150 130 120 50 50 MSZA30A (High precision type) MSZA50A(High precision type) D70 60 50 40 30 20 10 0 120 100 80 60 40 20 0 Load N Load N 291 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Compact Type

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

VNC

Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid Precautions Be sure to read before handling.

VXP21/22/23

Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500 740 420 420 VXP2130-03 VXP2140-03 VXP2130-04 VXP2140-04 VXP2150-06 0.04 0.04 0.04 0.04 0.04 0.04 0.5 0.5 1.0 0.5 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 0.7 0.7 1.0 0.7 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 2.0 2.4 5.0 2.4 5.5 9.2 0.5 0.5 0.7 0.5 0.7 0.7 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

0 t r y Aluminum NBR Resin SY i Stainless steel Aluminum NBR Steel o SYJ VQD1000-9-1 AXT632-7-13(M1.7 X 18) w SX Note) Body cannot be disassembled. VK VZ 3(R) 4(A) 1(P) 2(B) VF 1(P) VFR VP7 VP4 Valve Single Unit Option Piping plate assembly VQD1000-20A VQ VQ4 VQZ VQD VZS VFS VS Manifold style (VQD1131) can be changed to single unit style (VQD1121) by mounting plate assembly.

25

12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.