EXxx-OMY0006CN SI No. 1 COM M OUT 1 COM 0V 2 3 P OUT 1 Zone 1 4 SOL 0 0 Zone 1 ON Zone 1 11 SOL 7 7 Zone 1 ON 12 P OUT 2 Zone 2 13 SOL 8 8 Zone 2 ON Zone 2 20 SOL 15 15 Zone 2 ON 21 P OUT 3 Zone 3 22 SOL 16 16 Zone 3 ON Zone 3 29 SOL 23 23 Zone 3 ON 30 N. C. N.
(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17
T NPTF Coil rated Electrical entry 3 8 G F 1 100 VAC, 50/60 Hz Grommet Nil T Conduit terminal Standard 4 1 2 Option 2 200 VAC, 50/60 Hz Port size Manual override P None Nil Option WTB Dripproof conduit terminal 3 110 VAC, 50/60 Hz 1 4 Rc 3 8 Rc 1 2 Rc 3 4 Rc 02 03 04 06 TZ Conduit terminal w/ surge voltage suppressor 4 220 VAC, 50/60 Hz How to Calculate the Flow Rate 5 24 VDC 9 Other TL
6, and also to confirm that the main air supply adjustment nut t is rotating freely. Keep rotating the main air supply adjustment nut t to the right, and the point at which it stops is the initial air supply adjustment amount. After confirming the position of the main air supply adjustment nut t and the angle alignment scale of the main air supply scale plate !
x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread
6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.
Rc NPTF G NPT F N T, F, N are order made specifications.
Rc NPTF G NPT F N T, F, N are order made specifications.
500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 0.01 0.01 0.1 Rated pressure range Operating pressure range and regulating pressure range Proof pressure kPa MPa kgf/cm2 Note 1) Setting/Display resolution ZSE ISE bar psi mmHg inHg PSE Z I SE3 Fluid that will not corrode stainless steel 630 and 304 12 to 24 VDC, Ripple (p-p
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption
(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption
AK VCHC ASR ASQ 589 AS-FS Series Construction: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread o !0 !1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !
RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6
P N S Ground ball screw Rolled ball screw Slide screw 1 2 Series LJ1H10 Standard Motor Motor Output Ground Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 PB 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right
5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.
6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.
7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.