NVZseies

NWSZ+2l-e)l . NW3Z'AFOI Applic.H bse . Subplate {hNPlID: DXr201-2-1TP . Subplat (tlNPIR: DXT201-2-2TP . NW3Z5-40-O2 . NW3Z5-4r -Ol . NW3Z5-41-02 . NW3Z5-41R-Ol .

Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

E-MY2B_E_A

Perform maintenance for the product periodically. 4 Model Indication Method E-MY2B 16 100 T N M M9B General 3 positions 5 positions General Nominal size Number of auto switches 16 25 Auto switch Speed type L Low speed Cable length M Middle speed M 1m Nil Standard speed L 3m Z 5m Load type Q Heavy load Positioning stop number Nil Standard load Nil 3 positions E Midium load A 5 positions D

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Peltier-type Chiller Thermo-con/ Compact Type

D-G

High-precision Digital Pressure Switch

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

LECA6_C

7 + + + + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1LECA6 2DIN LECA6D 13 - 3.4. 1 DIN 2 LECA6 DINLECA6D DIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm 0mm (LE)10mm 25 LEH () 30mm 60mm 30mm 50mm DIN ) 15 - 4.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30-02BG For 0.4 MPa setting 1 l/min (ANR) or less (at P2 = 0.4 MPa) Air consumption Ex.) ARP30-02BG-1 For 0.2 MPa setting 0.6 l/min (ANR) or less (at P2 = 0.2 MPa) Ex.)

3 Way,3 Port Solenoid Valve NVZ Series

NWSZ+2l-e)l . NW3Z'AFOI Applic.H bse . Subplate {hNPlID: DXr201-2-1TP . Subplat (tlNPIR: DXT201-2-2TP . NW3Z5-40-O2 . NW3Z5-4r -Ol . NW3Z5-41-02 . NW3Z5-41R-Ol .

E-MY2_E_D

Mounting screw (M4) fig. 1 Mounting by L type bracket Mount the optional L type bracket on the main unit using the two mounting screws M5X8L and install on the facility using hexagon socket head cap screws as shown in fig. 2.

Fieldbus system (PROFIBUS DP compliant)

Memory map of output data Data (2 byte) Output area Branch connector (OUTPUT) MSB LSB MSB LSB 15 8 7 0 byte (d) byte (d+1) Word(c) COM A byte (d+2) byte (d+3) Word(c+1) COM B byte (d+4) byte (d+5) Word(c+2) COM C byte (d+6) byte (d+7) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

Thermoelectric Bath

Standard item Reference item [mg/L] 50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness [mg/L] 50 or less Calcium hardness (CaCO3) [mg/L] 30 or less Ionic state silica (SiO2) p p p p p p [mg/L] 0.3 or less Iron (Fe) [mg/L] 0.1 or less Copper (Cu) Should not be detected.

VVX31/32/33

6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

3 Port Solenoid Valve

(Indicator light and surge voltage suppressor) 5 + 13 15.5 3 (Mounting hole) 2-2.6 13 3 28.5 [35.5] 32.4 10 G: Approx. 300 H: Approx. 600 (Lead wire length) 1 30.8 [33] 33 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping port) M5 x 0.8 L plug connector (L): V1 4(A)-L-M5 1 2 M plug connector (M): V1 4(A)-M-M5 1 2 13.1 (Indicator light and surge voltage suppressor) (Indicator light and surge