Vacuum Filter AFJ Series Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.
SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.
120 140 160 180 200 220 240 260 Operating temperature C Inch size T T 20 TILM01 N 1.2 Max. operating pressure MPa D IDK 1.0 Tubing designation Length per roll Symbol 10 20 50 100 16 33 2S 0.8 Type Length 10 m 20 m 50 m 100 m 16 m (50 ft) 33 m (100 ft) 2 m 0.6 Color indication F Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black (Opaque) 0.4 Roll
SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.
K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector
5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5
Rotation time t (s) Rotary table: MSQB50A, Pressure: 0.5 MPa Mounting orientation: Vertical Load type: Inertial load Ta Load configuration: 100 mm x 60 mm (Rectangular plate) Rotation time t: 0.3s, Rotation angle: 90 . Rotation angle (rad) CRQ2 . Load mass m (kg) G .
16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.
Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum
Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum
r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A
Thus, it can be used in a Class 100 clean room.
It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.
5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.
ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.
E l e c t r i c a l c a b l e m u s t n o t b e s u b j e c t e d t o excessive force. 2 When connecting the switch, use a spanner on the h e x a g o n f i t t i n g . N E V E R u s e t o o l s o n t h e s w i t c h body. 3 Do not use switch near corrosive materials. 4 The switch is not liquid sealed.
t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.
+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100
10 1/4 2.48 0.39 1.46 0.84 AFF-EL2B 6.78 AFF4B-N03C-T 26 3/8 2.99 0.39 1.46 1.21 AFF-EL4B 8.04 AFF8B-N04C-T 53 1/2 3.55 0.39 1.46 1.98 AFF-EL8B 8.87 AFF11B-N06C-T 73 3/4 4.18 0.39 1.46 3.09 AFF-EL11B 10.2 AFF22B-N10C-T 123 1 4.8 0.39 1.46 4.63 AFF-EL22B 14.22 AFF37B-N14D-T 212 1 1/2 6.3 0.39 1.46 9.26 AFF-EL37B 18.64 AFF75B-N20D-T 424 2 8.67 0.39 1.46 23.15 AFF-EL75B 18.64 AFW675-N20-E1 675