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l Y w H w Y w l l " i I I I r r l i | v l l . s o w d ; l w | v w f f Y L : f <.t __ I i i Y f Fw -t wl5uwl sor-;sS sownsot Y r.L. rr 5 r r a r s o s o w l s o w f s o v l , * ; * 1 i ' l , l -1 l a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a MX9IEtr-@EHN+NE_I T l I r I I I I l I o , o o @ o a @ @ @ esrio" ruup @Auto switch See

CLS

20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 19 19 22 26 26 30 19 19 19 24 24 29 14 20 20 25 25 30 Up to 1000 3 5 30 46 114 M14 x 1.5 161 78 18 160 110 146 128 212 112 255 16 64 110 Up to 1000 130 M16 x 1.5 182 95 23 180 132 169 144 236 118 275 18.5 74 120 Up to 1200 16 21 35 30 34 42 5 5.5 6 149 M18 x 1.5 204 106 36 118 200 167 195 162 265 132 320 18.5

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

Vacuum Ejector Series ZM

(With light: 1.05 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Mass Made to Order (Refer to pages 1004 to 1006 for details.)

Air Slide Table Series MXJ

L1 A1 Mr Static moment Dynamic moment Graph (1) Load Mass: W W W MXJ4 A3 L3 L2 A2 0.10 L3 A3 Rubber stopper Mr Load mass W kg Mp 0.08 My Metal stopper W 0.06 W W 0.04 Mey Mep We 0.02 We L3 L2 A2 0.00 Collision speed V mm/s (Average speed x 1.4) 0 200 100 300 400 500 600 700 A3 MXJ6 Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front flange type: CHAWF Width across flats G 4-FD 4-J 2-Rc P T T V V Cushion adjustment screw MM Width across flats G GA Air release GA M MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting reference planes B D 16.5 14.5 Section AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) MXP16-20 MXP16-30 SMXP16, #1(#1 + #3) SMXP16, #2(#2 + #4) L K J V H S Z G M W Model 36 40 93 82 58 20

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

PFxx-OMY0005

Y 0: 2_P (Normal output) 1: 2_n (Reverse output) 1540 0x0604 0 R/W Dir (Setting of the accumulated flow direction) 0: Add 1: dEC1 2: dEC2 Addition/Subtraction U8 0 Y 1600 0x0640 0 R/W 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1 R/W FiL_FLoW (Digital filter_flow rate) U8 0 Y Set digital filter 1800 0x0708 2 R/W FiL_PrES (Digital filter_pressure) U16 10 Y 0 to 3000 ms 10 ms increments (0 to 30 sec.)

Rotary Clamp Cylinders

MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 8.5 To attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

HRX-OM-R005

-(BJM) . 9-5 9.3.2 HRS060-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS060--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS060-A-20-(BJM) . 9-7 9.5.2 HRS060-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS060--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-R005 Contents 9.9 Sample DoC. . 9-10 9.10 Daily Check

CQM

12 CUJ A B W CU 16/20/25 CQS CQM W A B CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ Hs 32/40/50 MU D(mm) -X D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type. 20Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

Compressed Air Preparation Filter

AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

%silltr

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Low Profile Slide Table Series MXF

moment Static moment L2 A3 W MXH Mp Mr My MXU W W W MXS L1 A2 L3 A6 W L2 A4 MXQ Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

REC

RSH REC20 20 Front flange: F Rear flange: G 39 50 56 61 0.3 Foot: L L CE1 10 30 38 43 47 0.5 W W W CE2 F 5 24 31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load