The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y5 MANIFOLD SY5000, UM, SS5Y5 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: -

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: None

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: None

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

Type: Thermo-Chiller, Cooling Method: Water Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: None

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set)

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)