High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

LG1H

LG1H/ Aluminum body With single end support and table moved to the end of the stroke W 10 50 Horizontal load 100% Horizontal load 50% 10 20 Amount of deflection (m) Horizontal Load point distance 1000 500 100 200 W 50 20 10 5 Lateral load 100% 1 2 Lateral load 50% Horizontal empty weight deflection Lateral empty weight deflection Load point distance Lateral 0.5 0.1 0.2 100 200 300 500 1000

Guide Cylinder Series MGG

368 Series MGG Guide Cylinder Construction 20 to 50/MGG q t w r y !

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Series MXP Precision Air Slide Table

10 J 6 Mounting base side B D 10 9.5 Across AA MXP10-20 Without magnet and switch rail 2-M30.5, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 2.5 4.7 6-M30.5 15 15 4 deep L (mm) Model G H J K L M N S V W Z MXP10-10 8 32 52.4 20 20 21 6.5 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55%

EX510

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

Refrigerated Air Dryers

, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15

HRL

Power consumption P: 20 [kW] Q = P = 20 [kW] Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = V: Power supply voltage P 24 [kW] Power consumption e Derive the heat generation amount from the output. Output (shaft power, etc.) W: 13 [kW] w Derive the heat generation amount from the power supply output.

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

A

T O O R D E R A I R F I LT E R (N)AF800-12 (1 14) (N)AF800-14 (1 12) (N)AF900-20 (2) H O W T O O R D E R A I R F I LT E R W I T H A U T O D R A I N (N)AF811-12 (1 14) (N)AF811-14 (1 12) (N)AF911-20 (2) ACCESSORIES A I R F I LT E R Filter Elements 11345-5B NAF800 11352-5B NAF900 Note) (N)AF AF Japanese NAF North American Courtesy of Steven Engineering, Inc. !

New

20 20 20 23 23 23 23 102 105 105 105 20 20 20 20 68.5 68.5 68.5 68.5 108 111 111 111 47.5 47.5 47.5 47.5 20 20 20 20 18 Series VXF2 Dimensions on the Mounting Side: Flange type VXF25B<<< VXF26B<<< 8 x M10 x 1.5 x 20 /C1 8 x M8 x 1.25 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 166p0.2 178p0.2 A-A A-A The surface roughness of the orifice machining should be Rz6.3 or less.

Modular Type Air Filters Series AF

Clearance For Maintenance A E W G AC-A AA Bowl Detail (AF20/AW20) M J N F (2) P1 (Port Size) C D V Q Q IN OUT K Note: Sight glass not applicable to all size 20 bowls. B P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min. Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

e b d f h11 (Shaft) f H9 (Hole) l1 c (Min.) a (Max.) 32 GKM10-20 M10 x 1.25 10+0.5 +0.15 40 10 10 52 20 20 40 GKM12-24 M12 x 1.25 12+0.5 +0.15 48 12 12 62 24 24 50, 63 GKM16-32 M16 x 1.5 16+0.5 +0.15 64 16 16 83 32 32 80, 100 GKM20-40 M20 x 1.5 20+0.5 +0.15 80 20 20 105 40 40 * Supplied with clevis pin and clevis pin bracket.

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

Digital Flow Switch (Manifold type)

Flow switch type Temp. sensor Flow range Port size A Symbol Flow adjustment valve Stop valve Nil 61.9 S 61.9 Nil P 95.9 W 95.9 0.5 to 4 L/min 3/8 (symbol 04) (symbol 03) Nil 72.9 S 72.9 Yes P 106.9 Remote sensor/ W 106.9 Integrated display type Nil 65.9 S 65.9 Nil P 99.9 3/8 W 99.9 (symbol 03) 2 to 16 L/min 1/2 (symbol 20) Nil 76.9 (symbol 04) S 76.9 Yes P 110.9 W 110.9 B: Total

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series

CQS

Type/Without Auto Switch Graph (4) Anti-lateral Load Type/With Auto Switch D-X 25 Allowable lateral load W (N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

ITV

3 VCHR 20 O-ring NBR w @1 @0 o 21 O-ring NBR ITV ITV 22 O-ring NBR e 23 Round head Phillips screw Steel IC Parts in contact with fluid are indicated with a mark . ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100 825 A Series ITV1000/2000/3000 Dimensions ITV10 Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn.

Air Slide Table

Front matter 1 Air Slide Table/Reversible Type Series MXQR Fig. (1) Load Weight: W (kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (3) Workpiece Mounting Coefficient: K Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L1 A1 K = 1 L3 A5 L2 A3 End plate mounting Mp Mr W My W W W L3 A6 W L1 A2

0.55

Piping specifications Manifold base Weight: W [g] Stations: n Applicable valve Applicable stations Note) Series Base model 1P (SUP) port type 3R (EXH) port type Port size VV3P3-41 Common VP300 2 to 20 stations W = 110n + 90 1/4 VP344 VV3P3-42 Individual VV3P5-41 Common VP500 Common 2 to 20 stations W = 190n + 150 3/8 VP544 VV3P5-42 Individual VV3P7-41 Common VP700 2 to 20 stations W = 410n