Compact Vacuum Unit

voltage Power consumption (Current) 0.7 W (29 mA) Note 2) 0.7 W (58 mA) Note 2) L-type plug connector (With light/surge voltage suppressor) M-type plug connector (With light/surge voltage suppressor) Note 3) Electrical entry Note 1) Latching type is applicable only to the ejector nozzle sizes 0.3 mm and 0.4 mm Note 2) Inrush: 3.1 W (10 ms after energized); Holding: 0.7 W Note 3) M-type can

HEC-OM-U015

HECR008-W HECR012-W 1 Unused BUS + 0 0 Operation temp. range 10.0 to 60.0 C (No dew condensation) 5 4 3 2 1 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 During operation or maintenance of the product, do not disable the Communication Indication temp. range -9.9 to 80.0 C 2 RXD (RD) Unused Circulating fluid temp. deg.C Circulating fluid temp. deg.C connector Temp: 10 to 35 C Humidity : 35

%silltr

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

3 Port Solenoid Valve

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-cast Note Gasket, 2 screws No. 10 11 Description Gasket assembly Sub-plate How to Order Connector Assembly q !0 w y !

HRX-OM-R028

Key-lock set data which is set in 5.8.5 Command:LOC Key-lock setting (W) is not the object to store.

Rotary Table/Rack & Pinion Style Series MSQ

CRQ2X MSQX MRQ Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch D-M9(V), D-M9W(V) D-A9, D-A9V Size Rotation Hysteresis angle Hysteresis angle Operating angle m 10 10 10 10 10 10 10 Operating angle m 10 10 10 10 10 10 10 A B A B 90 80 65 50 45 40 35 55 45

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

MXF

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

3 Port Solenoid Valve Series VQ100 1

1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-3Aq w e Option Cover color: Ivory 1 2 Standard type DIN rail mounting 1 4 17 10 5 11 16 17 20 L 52 30 10 U side end plate assembly part no.