Cooling Capacity: 050 [5000/5900, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: w/Electric Conductivity Control Function, Applicable to DI Water Piping, Option 2: No Flow Sensor or Retaining Clip

Cooling Capacity: 050 [5000/5900, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: w/Electric Conductivity Control Function, Applicable to DI Water Piping, Option 2: -

Cooling Capacity: 050 [5000/5900, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: w/Electric Conductivity Control Function, Applicable to DI Water Piping, Option 2: -

Cooling Capacity: 050 [4600/5100, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: DMUYZ1 (D+M+U+Y+Z1)

Cooling Capacity: 050 [4600/5100, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: UZ (U+Z)

Cooling Capacity: 050 [4600/5100, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: DMUZ1 (D+M+U+Z1)

Cooling Capacity: 050 [4600/5100, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: Rc, Option: DMU (DM+U)

Cooling Capacity: 050 [4600/5100, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option: MUZ1 (M+U+Z1)

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

LFE-OMZ0012

Otherwise, an injury or failure can result. Disassembly prohibited Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Please check the specifications before use. Do not Do not use in an atmosphere containing flammable or explosive gases. Fire or an explosion can result.

AR20-B to AR60-B

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

IN20267

Do not use the product in an environment where corrosive gases or fluids could be splashed. Otherwise damage to the product and malfunction can result. Do not use in an area where surges are generated.

E-P HYREG

0.1 0.1 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700/1701 VY1900/1901 Command

180

For details, refer to the IDK series in the Best Pneumatics No.6. 705 MHY2 Series Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 14 Series MQM Refer to the basic type on page 13 for other dimensions.

Angle Seat Valve /

, 25 10, 15, 20, 25, 35, 40, 50 N.C.

AMR3000 to 6000

Note 2) An element for the mist separator is included on the inlet side. Mineral grease is applied on the sliding parts inside the regulator. As such, improper use could cause run off of these lubricants to the outlet side. Please contact SMC if problems take place during operation.

Transfer

Besides, the whole accuracy after mounting on an equipment may be varied depending on the mounting condition and surroundings. As an equipment, calibration should be done by customer.

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

-31-4) DXT020-36 (AXT333-31-5) AXT333-20 o Carbon steel Mounting screw !