5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note) A total of up to 3 SUP/EXH blocks can be mounted.

CEU1

10VA 5W AC1500V1 AC500V 1 DC500V50 0+50 3585RH 1500V600V Hz 2 10G XYZ 3 250g 6 6 6 6 6 6 6 6-1 1 1 1 (DC12V60mA) B A G N D A B COM RS COM COM 12V G N D A B COM OUT1 AC100V OUT2 COM COM OUT3 COM DC24V GND AC100V (C E U 1) (C E U 1-D ) CEU1 +12V + 12V 1 A 680 CO M +12V + 12V 1 B 680 COM +12V D C 1 2 V60 m A GND RS COM FG AC100V 6 6 6 6-3 3 3 3 1C E U 1 CE1-R**

MHx-OMM0057

7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https

SMC Pneumatic Clean Series

N 1.5 N F A 1.5 F H S + Stroke 20 Non-lock manual release type K (This drawing shows the cases of 20 and 25.)

MXQ

-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-10 MXQ12-10 MXQ12-10 0.01 0.02 0.004 0 0 0 160 40 80 120 20 40 60 80 100 20 40 60 80 100 Load (N) Load (N) Load (N) 8-5-12 13 Air Slide Table Series MXQ Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Displacement at A when a load is applied to F with the slide table retracted

CNG

steel 25, 32 only 55 19 Steel ball A Carbon steel Cushion seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1

NCA1

A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 9/32 1.43 1 1.71 7.44 2.36 1.30 9.44 5.56 200 (2") 5/8 7/16-20 3/4 2.60 1 1/8 3/

Swivels

D Swivels Male Pipe Female Pipe A Part Number A B Dia.

MXS

MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 SMXS16A, #5(#1+#5) SMXS16A, #6(#2+#6) SMXS16A, #7(#3+#7) SMXS16A, #8(#4+#8+#9) SMXS16B, #4(#1+#4) SMXS16B, #5(#2+#5) SMXS16B, #6(#3+#6+#7) 125 173 223 3.11-18 Air Slide Table Series MXS With shock absorber(16) MXS16-llBS, BT, B 19 A 10 37.5 37.5 CL 18 18 55 MLGC CNA (mm) Stroke adjustment range Retracting 5 10 20 20 15 20 20 20 A dimension

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

Cylinder with Lock Series CNG

steel 25, 32 only 55 19 Steel ball A Carbon steel Cushion seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion

HRX-OM-X071

capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types

MQQ

79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to

SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

HRX-OM-O021

THERMO CHILLER HRS050-A-20 POWER SUPPLY SERIAL No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

CG5-S

Bore size A AL B1 H H1 MM Z ZZ LZ ZZ + Stroke CD hole H10 Shaft d9 M RR U GA GB L CX LL 2-Rc P H1 Width across flats B1 20 14 12.7 11.0 25.4 4.0 1/4-28 122.4 131.4 143.4 LY 25 14 12.7 12.6 28.4 4.8 5/16-24 125.4 134.4 146.4 32 21 19 17.3 41.4 6.4 7/16-20 142.4 153.4 171.4 CI D I 40 19 16.6 17.3 41.4 6.4 7/16-20 150.4 161.4 179.4 MM AL A K LH LE 50 22.4 19.8 18.8 52.6 7.9 1/2-20 183.6 198.6

MHF2

model which will provide a gripping force 10 to 20 times the weight of the work piece.