VPA4

Symbol 0 P Side 1 E Side Side Bottom (1) Side Other A, B Side 9 Note 1) Size of A, B port bottom ported: Rc 3/8, 1/2 Option Stations Base specifications 2 1 Individual exhaust Common exhaust 02 2 stations 10 10 stations How to Assemble Manifold To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

For Water Digital Flow Switch Series PFW

: 30V Maximum load current: 80mA Internal voltage drop: 1.5V or less (with load current of 80mA) NPN open collector Note 2) Output specifications Switch output PNP open collector Indicator lights Lights up when ON, OUT1: Green, OUT2: Red Response time 1s or less Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits) Note 3) Hysteresis 12 to 24VDC (ripple 10%

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Nickel Plated

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Size: 46 (42.5 O.D.), Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Option: None, Size: 57, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Clear cover has no protrusion (clear cover cannot be removed), Unit

Type: Pressure Gauge W/ Color Zone, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Transparent cover material: Polycarbonate, Special Configurations: -, Attachment: Clear cover has no protrusion (clear cover cannot be removed)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

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CAT.E814-@ 6SI\C Digital Pressure Switch Series ZSE6/ISE6 (For Vacuum) (For Positive Pressure) Leakage Rating: 1 X 10-9 atm ccls Sensor and fining section are electron-beam welded. VCRc" style and Swagelok type fitting connections provide for high integrity sealing. Applicable for pressure detection of fluids and gases where leakage is unacceptable.

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: CN (C + N), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: R (Flow Direction: Right to Left)

Fluid: compressed air, Noise reduction: 25-35 dB(A) or more, Maximum operating pressure: 1.0MPa, Effective area mm 2 (Cv): AN*00 35-960 (1.9-53); AN*02 35-90 (1.9-5.0); AN*03 10-60 (0.6-3.3), Ambient and fluid temperature: 5 - 60 C, MUFFLER 3/4 PT, AIRLINE EQUIPMENT, AN SILENCER, GB, AN 3/4INCH STANDARD (PT), .48400 lb, ModelEffective area mm2Sonic conductance C [dm3/(s?

Fluid: compressed air, Noise reduction: 25-35 dB(A) or more, Maximum operating pressure: 1.0MPa, Effective area mm 2 (Cv): AN*00 35-960 (1.9-53); AN*02 35-90 (1.9-5.0); AN*03 10-60 (0.6-3.3), Ambient and fluid temperature: 5 - 60 C, MUFFLER 1-1/4 PT, AIRLINE EQUIPMENT, AN SILENCER, IB, AN 1 1/4INCH STANDARD (PT), 1.27720 lb, ModelEffective area mm2Sonic conductance C [dm3/(s?

Fluid: compressed air, Noise reduction: 25-35 dB(A) or more, Maximum operating pressure: 1.0MPa, Effective area mm 2 (Cv): AN*00 35-960 (1.9-53); AN*02 35-90 (1.9-5.0); AN*03 10-60 (0.6-3.3), Ambient and fluid temperature: 5 - 60 C, MUFFLER 2 PT, AIRLINE EQUIPMENT, AN SILENCER, KB, AN 2 INCH STANDARD (PT), 2.17455 lb, ModelEffective area mm2Sonic conductance C [dm3/(s?