Compact Vacuum Ejector Series ZA

When in need of a valve with a lead-wire longer than 600 mm, place an order for a valve without a connector and connector assembly.

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 12v/50Hz Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 12, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09

AWG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AWG20 Rc1/4 AWG30 Rc3/8 AWG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 0 500 1000 1500 0 1000 2000 3000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch fittings w Replacement Element Part No. e q Part no.

Air Slide Table

MXQR20-40 MXQR20-75 MXQR20-75 0.06 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR20-50 MXQR20-30 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 0.06 MXQR20-50 MXQR20-150 MXQR20-100 0.08 MXQR20-125 MXQR20-30 0.04 MXQR20-20 MXQR20-100 0.04 MXQR20-20 MXQR20-10 0.04 0.02 MXQR20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600

Air Slide Table Series MXW

500 100 200 300 400 600 Load (N) Load (N) Load (N) 152 Series MXW Air Slide Table Option Specifications Stopper Bolt Assembly Stopper bolt assembly can be ready for the following manner.

Electric Actuators

100 to 800 200 to 1000 Size 16 25 32 40 Size Stroke 100 to 600 100 to 800 200 to 1000 25 32 40 CAT.NAS100-87 Slide Table Guide Rod Slider Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Belt drive Basic type (R type) Series LESHmR Symmetrical type (L type) Series LESHmL In-line motor type (D type) Series LESHmD Series LEL Size 25 Stroke 100 to 1000 Stroke 50, 75

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

100 to 600

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

100 to 600

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

100 to 600

100 to 600

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or