Exhaust Cleaner for Clean Rooms AMP Series

(Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 Tel: (606) 647-5600 FAX: (606) 647-5609 SMC Pneumatics Inc.

Speed Controller: Standard Type Series AS In-line Type

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5 16.5 16 285.5 275 253.5 16 15 273 262.5 243 15 14 260.5 250 232.5 14 13 248 237.5 222 13 12 235.5 225 211.5 12 11 235.5 225 201 17.5 10 223 212.5 190.5 16.5 9 210.5 200 180 15.5 8 198 187.5 169.5 14.5 7 185.5 175 159 13.5 6 173 162.5 148.5 12.5 5 173 162.5 138 17.5 L1 L2 L3 L4 358 Series SV EX500 Gateway

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

3 Position Cylinder Series RZQ

M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

5 Port Solenoid Valve

Cylinder side pressure (P2) Specifications Max. operating pressure Min. operating pressure Ambient and fluid temperature Flow-rate characteristics: C Max. operating frequency 116 psi (0.8 MPa) 22 psi (0.15 MPa) 23 to 122F (5 to 50C) 0.60 dm3/ (sbar) 180 c.p.m SUP side pressure (P1) To cylinder port Plug-in Manifold Stacking Base Slim Compact Plug-in Manifold Bar Base Note) Based on JIS B

Process Valve Series VNA

Series VNC Coolant Valve: Air Operated/External Pilot Solenoid Flange Type/Port size: 32F, 40F, 50F Electrical entry port: G1/2 Pilot port 12(P1), 10(P2) Port size: refer to table below Manual override (Non-locking push type) 4 x 2 x 18 mouting hole Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) L VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 130 150 180

2/3 Port Valve for Various

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

ZP

(Reference value) ZF Model Dia. of cylindrical workpiece which can be absorbed: A (1) ZP 40HB 80 or more ZP 50HB 100 or more ZCU 63HB 120 or more 80HB 160 or more AMJ 100HB 180 or more 125HB 230 or more Misc. Please consult with SMC when requiring a diameter smaller than shown in table.

Vacuum Pad

1.80-1.82 1.15-1.25 0.86-0.87 1.00-1.20 0.95-0.98 0.4 g/cm3 0.161 g/cm3 / / Impact resilience / / Abrasion resistance Physical properties of blended gum Chemical resistance Oil resistance Alkaline resistance Acid resistance / / Tear resistance / / Flex crack resistance Maximum operation temperature C Minimum operation temperature C Volume resistivity (cm) 120 150 100 250 150 200 60 200 180

Vacuum Pad

1.80-1.82 1.15-1.25 0.86-0.87 1.00-1.20 0.95-0.98 0.4 g/cm3 0.161 g/cm3 / / Impact resilience / / Abrasion resistance Physical properties of blended gum Chemical resistance Oil resistance Alkaline resistance Acid resistance / / Tear resistance / / Flex crack resistance Maximum operation temperature C Minimum operation temperature C Volume resistivity (cm) 120 150 100 250 150 200 60 200 180

Membrane Air Dryer

Purge air flow rate (L/min [ANR]) 180 Existing model 160 Reduction ratio 140 31% IDG50A New New 120 Purge air flow rate (rated conditions) 100 80 Model Purge air flow rate Purge ratio Running cost 60 (L/min [ANR]) (%) (yen/year) 40 46,440 15 86 IDG50A New New 0 Existing model 67,500 20 125 0.0 0.5 1.0 [Calculation conditions] Air unit price: 3 yen/m3 Operating hours: 12 hours/day Annual operating

Dual Rod Cylinder Series CXSJ/CXS

CX2 CXW 2.5 CXSM CXSL 32 CXT 2 Maximum load mass W (kg) CXSJ CXS 1.5 25 20 15 1 D10 -X 0.5 Individual -X 6 20 40 60 80 100 120 140 160 180 200 0 Cylinder stroke (mm) 563 Series CXS Construction: Slide Bearing CXSM6 !5 y!6 @3@0 @1r w !3 !0!9ut !4 !7 !1 !2 e !8 q @4 @2 @5 CXSM10 CXSM15 !7 !5 @6 @1 r w !3 i !0 !9 u t !6 !7 !5 @6@0@1r w !3i!0!9u t!6 !4 y e !1 !2 @0 !8 q !4y e !1 !2 q !

CKZ2N

from pivot point (inches) 130 Distance from pivot point (mm) 5.0 120 60 75 90 105 120 135 4.5 110 4.0 100 90 3.5 80 3.0 70 2.5 60 2.0 50 0 0 5 10 15 20 25 30 35 40 45 50 55 60 1 2 3 4 5 6 7 8 9 10 11 12 13 Load capacity (pounds) Load capacity (N) 63 300 12.0 280 11.0 260 Distance from pivot point (inches) Distance from pivot point (mm) 10.0 240 9.0 220 30 45 60 75 90 105 120 135 200 8.0 180

Pilot Operated

172.5 (180) 51.5 54.5 59 97 89.5 89.5 185 (192.5) 106.5 99 98.5 99 198.5 (205.5) 112.5 105 104.5 105 ( ) denotes the value for N.O. 12 Series VXD21/22/23 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

0.4

Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

High Power Cylinder Series RHC

Solenoid valve ( ): Effective area [mm2] : Metal seal Speed controller D 36 to 45 E 64.8 to 67 F 102.6 to 120 G 180 to 300 C 16.2 to 21.6 Composed effective area (mm2) 2 Standard type 1 With One-touch fittings Elbow type 1-A Refer to System Selection table, and the appropriate solenoid valve, speed control valve and bore size may be selected.

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

.: GR-S-010 (10 g) 72 Compact Cylinder/Large Bore Size: Double Acting, Single Rod Series CQ2 Replacement Procedure is 125, 140, 160 180, 200 P.290 Construction Standard Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !2 !3 !

Magnet: D (Switch Unit), Body Size: 1, Rotation Angle: 180 (Rotation Angle 180), Vane Type: S (Single), Port: Side, Auto Switch: S9P--Solid State, Grommet, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)